论文信息 - Stamp printing of silicon nanomembrane based flexible photonic devices - 字舞流文

Stamp printing of silicon nanomembrane based flexible photonic devices

We demonstrate for the first time stamp printing of silicon nanomembrane based photonic devices onto flexible substrate utilizing protection layer and suspended configuration. The propagation loss of the transferred waveguide is ~1.1dB/cm.

Che-Yun Lin | A. Hosseini | Xiaochuan Xu | Che-yun Lin | Xiaochuan Xu | A. Hosseini | H. Subbaraman | D. Kwong | R. T. Chen | H. Subbaraman | D. Kwong

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