Effect of focusing flow on stationary spot machining properties in elastic emission machining

Ultraprecise optical elements are applied in advanced optical apparatus. Elastic emission machining (EEM) is one of the ultraprecision machining methods used to fabricate shapes with 0.1-nm accuracy. In this study, we proposed and experimentally tested the control of the shape of a stationary spot profile by introducing a focusing-flow state between the nozzle outlet and the workpiece surface in EEM. The simulation results indicate that the focusing-flow nozzle sharpens the distribution of the velocity on the workpiece surface. The results of machining experiments verified those of the simulation. The obtained stationary spot conditions will be useful for surface processing with a high spatial resolution.

[1]  Y. Mori,et al.  Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining , 2002 .

[2]  Axel Schindler,et al.  Precision optical asphere fabrication by plasma jet chemical etching (PJCE) and ion beam figuring , 2001, Optics + Photonics.

[3]  Hidekazu Mimura,et al.  Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm , 2008, Optical Engineering + Applications.

[4]  Greg Forbes,et al.  Recent advances in sub-aperture approaches to finishing and metrology , 2006, International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT).

[5]  Y. Mori,et al.  Effect of Particle Morphology on Removal Rate and Surface Topography in Elastic Emission Machining , 2006 .

[6]  G. Ahmadi.  On the k-ϵ model of turbulence , 1985 .

[7]  H. Soyama,et al.  High-Speed Observations of the Cavitation Cloud around a High-Speed Submerged Water Jet , 1995 .

[8]  Y. Mori,et al.  Highly resolved scanning tunneling microscopy study of Si(0 0 1) surfaces flattened in aqueous environment , 2006 .

[9]  Y. Mori,et al.  Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics , 2007 .

[10]  Takahiro Saitou,et al.  Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval , 2012, Other Conferences.

[11]  Ram Balachandar,et al.  An experimental and numerical study of water jet cleaning process , 2011 .

[12]  Yoshiaki Yamauchi,et al.  High-Speed Observations of the Cavitation Cloud around a High-Speed Submerged Water Jet , 1995 .

[13]  Hidekazu Mimura,et al.  Two-dimensional Submicron Focusing of Hard X-rays by Two Elliptical Mirrors Fabricated by Plasma Chemical Vaporization Machining and Elastic Emission Machining , 2003 .