High temperature nitrogen plasma immersion ion implantation into molybdenum

Abstract High dose, high temperature nitrogen implantation into molybdenum was realised in a plasma immersion ion implantation system with additional heating in the temperature range between 500 and 750 °C. X-ray diffraction spectra show the transformation of c-Mo2N into t-Mo2N near 580 °C. At the same temperature, the thermally activated growth of the layer thickness by diffusion from the surface became noticeable. A variation of the pulse voltage between 5 and 30 kV did not change the nitrogen surface concentration in sputter saturation.

[1]  A. Freeman,et al.  LDA calculations of the pressure induced structural changes and phase transitions in PbTiO3 , 1995 .

[2]  I. Donnelly,et al.  Plasma immersion ion implantation using plasmas generated by radio frequency techniques , 1988 .

[3]  L. Thompson,et al.  Control of composition and structure for molybdenum nitride films synthesized using ion beam assisted deposition , 1995 .

[4]  J. Cuomo,et al.  Handbook of ion beam processing technology , 1989 .

[5]  A. F. Çakır,et al.  Effect of nitrogen pressure, bias voltage and substrate temperature on the phase structure of Mo–N coatings produced by cathodic arc PVD , 2003 .

[6]  S. Mändl,et al.  Heat balance during plasma immersion ion implantation , 2001 .

[7]  W. Assmann,et al.  Phase formation and diffusion after nitrogen PIII in molybdenum , 2003 .

[8]  Myung-Hwan Whangbo,et al.  Orbital Interactions in Chemistry , 1985 .

[9]  M. Avrami.  Kinetics of Phase Change. I General Theory , 1939 .

[10]  J. Ziegler,et al.  stopping and range of ions in solids , 1985 .

[11]  J. Armor,et al.  Ammoxidation of Ethane to Acetonitrile over Metal–Zeolite Catalysts , 1998 .

[12]  J. R. Conrad,et al.  Plasma source ion-implantation technique for surface modification of materials , 1987 .

[13]  S. Mändl,et al.  Interplay of surface adsorption and preferential sputtering in metal plasma immersion ion implantation and deposition , 2003 .

[14]  J. Valli,et al.  Tribological properties of MoNx coatings in contact with copper , 1986 .

[15]  M. Nastasi,et al.  Ion solid interactions , 1996 .

[16]  F. A. Smidt.  Use of ion beam assisted deposition to modify the microstructure and properties of thin films , 1990 .

[17]  S. Mändl,et al.  Rutile formation and oxygen diffusion in oxygen PIII-treated titanium , 2001 .

[18]  R. Fontana,et al.  Properties of chromium nitride coatings deposited by cathodic arc evaporation , 1993 .

[19]  B. Tang,et al.  Measurement of ion species ratio in the plasma source ion implantation process , 1993 .

[20]  J. Sundgren,et al.  Structure and properties of TiN coatings , 1985 .

[21]  W. Möller,et al.  Inherent possibilities and restrictions of plasma immersion ion implantation systems , 1996 .

[22]  Walter Assmann,et al.  Elastic recoil detection analysis with heavy ions , 1994 .

[23]  J. S. Lee,et al.  Molybdenum nitride and carbide prepared from heteropolyacid: II. Hydrodenitrogenation of indole , 1998 .