Co-integrated 1.3µm hybrid III-V/silicon tunable laser and silicon Mach-Zehnder modulator operating at 25Gb/s.

In this paper, the 200mm silicon-on-insulator (SOI) platform is used to demonstrate the monolithic co-integration of hybrid III-V/silicon distributed Bragg reflector (DBR) tunable lasers and silicon Mach-Zehnder modulators (MZMs), to achieve fully integrated hybrid transmitters for silicon photonics. The design of each active component, as well as the fabrication process steps of the whole architecture are described in detail. A data transmission rate up to 25Gb/s has been reached for transmitters using MZMs with active lengths of 2mm and 4mm. Extinction ratios of respectively 2.9dB and 4.7dB are obtained by applying drive voltages of 2.5V peak-to-peak on the MZMs. 25Gb/s data transmission is demonstrated at 1303.5nm and 1315.8nm, with the possibility to tune the operating wavelength by up to 8.5nm in each case, by using metallic heaters above the laser Bragg reflectors.

[1]  B. Ben Bakir,et al.  Hybrid Si/III-V Fabry-Perot lasers based on adiabatic mode transformers , 2010, 7th IEEE International Conference on Group IV Photonics.

[2]  Thomas Ferrotti,et al.  1310 nm hybrid InP/InGaAsP on silicon distributed feedback laser with high side-mode suppression ratio. , 2015, Optics express.

[3]  Richard Geiger,et al.  Group IV Direct Band Gap Photonics: Methods, Challenges, and Opportunities , 2015, Front. Mater..

[4]  Di Liang,et al.  A Distributed Bragg Reflector Silicon Evanescent Laser , 2008, IEEE Photonics Technology Letters.

[5]  Thomas Ferrotti,et al.  O-Band III–V-on-Amorphous-Silicon Lasers Integrated With a Surface Grating Coupler , 2016, IEEE Photonics Technology Letters.

[6]  Frederic Boeuf,et al.  Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform , 2016, Journal of Lightwave Technology.

[7]  Corrado Sciancalepore,et al.  Low-Crosstalk Fabrication-Insensitive Echelle Grating Demultiplexers on Silicon-on-Insulator , 2015, IEEE Photonics Technology Letters.

[8]  Ian O'Connor,et al.  Electro-Optical Ring Modulator: An Ultracompact Model for the Comparison and Optimization of p-n, p-i-n, and Capacitive Junction , 2016, IEEE Journal of Selected Topics in Quantum Electronics.

[9]  Guo-Qiang Lo,et al.  Ultra-Responsive Phase Shifters for Depletion Mode Silicon Modulators , 2013, Journal of Lightwave Technology.

[10]  Lars Zimmermann,et al.  25 Gb/s Silicon Photonics Interconnect Using a Transmitter Based on a Node-Matched-Diode Modulator , 2016, Journal of Lightwave Technology.

[11]  Amnon Yariv,et al.  Adiabaticity criterion and the shortest adiabatic mode transformer in a coupled-waveguide system. , 2009, Optics letters.

[12]  John E. Bowers,et al.  Integrated AlGaInAs-silicon evanescent race track laser and photodetector. , 2007 .

[13]  John E. Cunningham,et al.  Power-efficient III-V/silicon external cavity DBR lasers. , 2012, Optics express.

[14]  T Pinguet,et al.  A Grating-Coupler-Enabled CMOS Photonics Platform , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[15]  Jiaoqing Pan,et al.  Hybrid InGaAsP-Si Evanescent Laser by Selective-Area Metal-Bonding Method , 2013, IEEE Photonics Technology Letters.

[16]  D Van Thourhout,et al.  Heterogeneously integrated III-V/silicon distributed feedback lasers. , 2013, Optics letters.

[17]  M. Chagnon,et al.  Design, analysis, and transmission system performance of a 41 GHz silicon photonic modulator. , 2015, Optics express.

[18]  E. Morallón,et al.  Switchable Surfactant-Assisted Carbon Nanotube Coatings: Innovation through pH Shift , 2015, Front. Mater..

[19]  Wei Li,et al.  Electrically pumped continuous-wave III–V quantum dot lasers on silicon , 2016, Nature Photonics.

[20]  W. Bogaerts,et al.  An Equivalent Circuit Model of the Traveling Wave Electrode for Carrier-Depletion-Based Silicon Optical Modulators , 2012, Journal of Lightwave Technology.

[21]  Daniel Mahgerefteh,et al.  Techno-economic comparison of Silicon Photonics and multimode VCSELs , 2016, 2015 Optical Fiber Communications Conference and Exhibition (OFC).

[22]  Pai-Yen Chen,et al.  Dielectric Antireflection Fiber Arrays for Absorption Enhancement in Thin-Film Organic Tandem Solar Cells , 2016, IEEE Journal of Selected Topics in Quantum Electronics.

[23]  Paul Crozat,et al.  High-performance waveguide-integrated germanium PIN photodiodes for optical communication applications [Invited] , 2013 .

[24]  Peter O'Brien,et al.  Hybrid Integration of the Wavelength-Tunable Laser With a Silicon Photonic Integrated Circuit , 2013, Journal of Lightwave Technology.

[25]  J. Bowers,et al.  Electrically pumped hybrid AlGaInAs-silicon evanescent laser. , 2006, Optics express.

[26]  Qian Wang,et al.  Heterogeneous Si/III-V integration and the optical vertical interconnect access , 2012 .

[27]  M. Paniccia,et al.  A continuous-wave Raman silicon laser , 2005, Nature.

[28]  Jung ho Park,et al.  Low-loss silicon waveguides with sidewall roughness reduction using a SiO2 hard mask and fluorine-based dry etching , 2014 .

[29]  G. Lo,et al.  Novel integration technique for silicon/III-V hybrid laser. , 2014, Optics express.

[30]  Frédéric Milesi,et al.  High extinction ratio 10 Gbit/s silicon optical modulator. , 2011, Optics express.

[31]  Guo-Qiang Lo,et al.  High-Speed Silicon Modulator With Slow-Wave Electrodes and Fully Independent Differential Drive , 2014, Journal of Lightwave Technology.

[32]  Kaikai Xu.  Corrections to “On the Design and Optimization of Three-Terminal Light-Emitting Device in Silicon CMOS Technology” , 2014 .

[33]  Tom Baehr Jones,et al.  50 Gb/s silicon traveling wave Mach-Zehnder modulator near 1300 nm , 2013, OFC 2014.

[34]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .