论文信息 - Demonstration of High Quality 4H-SiC Epitaxy by Using the Two-Step Growth Method - 字舞流文

Demonstration of High Quality 4H-SiC Epitaxy by Using the Two-Step Growth Method

S. Yamakawa | M. Imaizumi | H. Sumitani | N. Tomita | Takanori Tanaka | A. Ohno | T. Kuroiwa | M. Tarutani | Y. Toyoda | Yoichiro Mitani | K. Hamano