A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
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J. F. Creemer | L. Mele | G. Pandraud | B. Morana | F. Santagata | J.F. Creemer | P. Sarro | G. Pandraud | F. Santagata | L. Mele | B. Morana | P.M. Sarro | M. Mihailovic | M. Mihailović
[1] M. Mehregany,et al. Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications , 2005 .
[2] Mehran Mehregany,et al. A study of electrical properties and microstructure of nitrogen-doped poly-SiC films deposited by LPCVD , 2007 .
[3] J. F. Creemer,et al. Atomic Imaging of Phase Transitions and Morphology Transformations in Nanocrystals , 2009, Advanced materials.
[4] J. F. Creemer,et al. A MEMS Reactor for Atomic-Scale Microscopy of Nanomaterials Under Industrially Relevant Conditions , 2010, Journal of Microelectromechanical Systems.
[5] John Damiano,et al. A new MEMS‐based system for ultra‐high‐resolution imaging at elevated temperatures , 2009, Microscopy research and technique.