Low loss poly-silicon for high performance capacitive silicon modulators.

Optical properties of poly-silicon material are investigated to be integrated in new silicon photonics devices, such as capacitive modulators. Test structure fabrication is done on 300 mm wafer using LPCVD deposition: 300 nm thick amorphous silicon layers are deposited on thermal oxide, followed by solid phase crystallization anneal. Rib waveguides are fabricated and optical propagation losses measured at 1.31 µm. Physical analysis (TEM ASTAR, AFM and SIMS) are used to assess the origin of losses. Optimal deposition and annealing conditions have been defined, resulting in 400 nm-wide rib waveguides with only 9.2-10 dB/cm losses.

[1]  Frederic Boeuf,et al.  Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform , 2016, Journal of Lightwave Technology.

[2]  G. Lo,et al.  Influence of RTA and LTA on the Optical Propagation Loss in Polycrystalline Silicon Wire Waveguides , 2010, IEEE Photonics Technology Letters.

[3]  David J. Thomson,et al.  Silicon optical modulators , 2010 .

[4]  J. Seto.  The electrical properties of polycrystalline silicon films , 1975 .

[5]  Paul Crozat,et al.  Low voltage 25Gbps silicon Mach-Zehnder modulator in the O-band. , 2017, Optics express.

[6]  Zhifang Li,et al.  Monitoring Kidney Microanatomy Changes During Ischemia-Reperfusion Process Using Texture Analysis of OCT Images , 2017, IEEE Photonics Journal.

[7]  Jens H. Schmid,et al.  Roadmap on silicon photonics , 2016 .

[8]  Thomas Ferrotti,et al.  Co-integrated 1.3µm hybrid III-V/silicon tunable laser and silicon Mach-Zehnder modulator operating at 25Gb/s. , 2016, Optics express.

[9]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .

[10]  Vladimir Stojanovic,et al.  Low-loss polysilicon waveguides fabricated in an emulated high-volume electronics process. , 2012, Optics express.

[11]  M. Nedeljkovic,et al.  Free-Carrier Electrorefraction and Electroabsorption Modulation Predictions for Silicon Over the 1–14- $\mu\hbox{m}$ Infrared Wavelength Range , 2011, IEEE Photonics Journal.

[12]  E. Rauch,et al.  Automated crystal orientation and phase mapping in TEM , 2014 .

[13]  L. Liao,et al.  Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength , 2000 .

[14]  Dominic Goodwill,et al.  U-shaped PN junctions for efficient silicon Mach-Zehnder and microring modulators in the O-band. , 2017, Optics express.

[15]  J. Stoemenos,et al.  Polycrystalline silicon thin-film transistors with two-step annealing process , 1993, IEEE Electron Device Letters.

[16]  C. Alonso-Ramos,et al.  Developments in 300mm silicon photonics using traditional CMOS fabrication methods and materials , 2017, 2017 IEEE International Electron Devices Meeting (IEDM).

[17]  Son Van Nguyen,et al.  High-density plasma chemical vapor deposition of silicon-based dielectric films for integrated circuits , 1999, IBM J. Res. Dev..

[18]  M. Takenaka,et al.  High-performance Si optical modulator with strained p-SiGe layer and its application to 25 Gbps optical transceiver , 2017, 2017 IEEE 14th International Conference on Group IV Photonics (GFP).

[19]  C. Lavoie,et al.  Impact of laser anneal on NiPt silicide texture and chemical composition , 2017 .

[20]  Lars Zimmermann,et al.  25 Gb/s Silicon Photonics Interconnect Using a Transmitter Based on a Node-Matched-Diode Modulator , 2016, Journal of Lightwave Technology.