论文信息 - Design and fabrication of a novel MEMS thermoelectric generator

Design and fabrication of a novel MEMS thermoelectric generator

A thermoelectric microgenerator based on a novel structure, in which the heat flowing in elements with different thermal resistances produces local temperature differences in the device, has been designed, fabricated in BESOI technology and experimentally characterized. The temperature differences in the microgenerator are converted into a voltage by means of the Seebeck effect exploiting planar thermocouples.

Vittorio Ferrari | V. Ferrari | Simone Dalol | Simone Dalol

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