Silicon photodiode-waveguide coupling—Two-dimensional modelling, software simulation and experiments

Abstract In the present paper a system composed of a waveguide coupled by leaky waves with a photodiode on the same silicon chip is studied. Maxwell's equations for this system have been solved, with light attenuation and propagation constants being calculated. The light attenuation is determined by the silicon and waveguide parameters. A two-dimensional analysis of current generation in the photodiode has been performed. The two directions considered are the direction of the incoming lightwave (which is parallel to the photodiode junction plane and coupling surface) and the direction normal to the junction plane. Based on this analysis, a system software simulator has been developed. The simulator is used to study the influence of technological parameters on the photocurrent and to design a test structure. In order to measure the test structures a special computer-driven opto-mechanical system has been designed and realized.