ROIC glow reduction in very low flux short wave infra-red focal plane arrays for astronomy

CEA and Lynred develop very large focal plane arrays (FPA) in the short wave infrared range (SWIR) with ultra-low dark current for space and astronomy applications. The structure of such arrays is based on a HgCdTe sensitive layer flipchipped onto a Si ROIC. This ROIC is based on a source follower per detector input and output stage giving access to very high gains for very low flux (below 1ph/s) and very low noise (11.5e-) measurements. However, during previous characterisations, these FPAs appeared particularly sensitive to electro-luminescence emitted by ROIC source follower output stage transistors in the saturation regime. Indeed, the emitted photons are in the sensitive wavelength range of the HgCdTe layer (2.1 μm cut-off). They are then collected by the photodiodes thus degrading the measured dark current. This phenomenon, called ROIC glow, is the limiting mechanism of dark current at low temperature for such arrays. We describe here a solution to reduce to ground level this ROIC glow. MOSFET drain to source voltage is a major parameter for limiting glow and our results show good agreement with hot electrons light emission models. Transfer function characterisation of the ROIC was also performed to highlight the limits of the proposed procedure, which is that the source follower MOSFETs must stay in the saturated regime. Measurements carried out on different characterisation benches and several detectors at CEA-LETI and CEA-DAP show dark currents below 0.03e/s/pixel after glow mitigation.

[1]  Philippe Chorier,et al.  Infrared ROIC for very low flux and very low noise applications , 2011, Remote Sensing.

[2]  L. Balk,et al.  A review of near infrared photon emission microscopy and spectroscopy , 2005, Proceedings of the 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005..

[3]  Scott T. Chapman,et al.  Canada-France-Hawaii Telescope's “redeye” infrared camera system: Array performance , 1994 .

[4]  이준호,et al.  LS 알고리즘을 이용한 통계적 위치추정 바이어스 , 2015 .

[5]  O. Gravrand,et al.  Development of astronomy large focal plane array "ALFA" at Sofradir and CEA , 2018, Astronomical Telescopes + Instrumentation.

[6]  F. Zappa,et al.  Tools for non-invasive optical characterization of CMOS circuits , 1999, International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318).

[7]  Giuseppe La Rosa,et al.  A review of hot-carrier degradation mechanisms in MOSFETs , 1996 .

[8]  O. Gravrand,et al.  Ultralow-Dark-Current CdHgTe FPAs in the SWIR Range at CEA and Sofradir , 2012, Journal of Electronic Materials.

[9]  Donald N. B. Hall,et al.  Performance of science grade HgCdTe H4RG-15 image sensors , 2016, Astronomical Telescopes + Instrumentation.

[10]  Bude,et al.  Hot-carrier luminescence in Si. , 1992, Physical review. B, Condensed matter.

[11]  A. Tosi,et al.  Hot-Carrier Photoemission in Scaled CMOS Technologies: A Challenge for Emission Based Testing and Diagnostics , 2006, 2006 IEEE International Reliability Physics Symposium Proceedings.

[12]  O. Boulade,et al.  Development and characterisation of MCT detectors for space astrophysics at CEA , 2017, International Conference on Space Optics.

[13]  O. Boulade,et al.  Persistence and dark current characterization on HgCdTe short wave infrared imagers for astronomy at CEA and Lynred , 2020, Astronomical Telescopes + Instrumentation.

[14]  J.C.H. Phang,et al.  Near-infrared spectroscopic photon emission microscopy of 0.13 μm silicon nMOSFETs and pMOSFETs , 2008, 2008 15th International Symposium on the Physical and Failure Analysis of Integrated Circuits.