论文信息 - Quantitative Chemically-Specific Coherent Diffractive Imaging of Reactions and Diffusion at Buried Interfaces using a Tabletop EUV Nanoscope

Quantitative Chemically-Specific Coherent Diffractive Imaging of Reactions and Diffusion at Buried Interfaces using a Tabletop EUV Nanoscope

We demonstrate imaging of optically opaque nanostructures buried beneath a thick layer of aluminum using a tabletop extreme ultraviolet source. Our non-destructive technique uncovers interfacial diffusion and oxidation between layers, validated using destructive techniques.

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