A 13GHz CMOS distributed oscillator using MEMS coupled transmission lines for low phase noise

A coupled distributed oscillator is designed using low-loss MEMS coupled transmission lines to achieve phase noise improvement of 7dB, and an additional 2dB improvement is attributed to the MEMS transmission lines. The oscillators are fabricated in a 0.18/spl mu/m 6M CMOS process, operate with a 1V supply and consume 26mW.

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