1.53 µm photo- and electroluminescence from Er3+ in erbium silicate

Si-rich silicon oxide (SRO)/Er–Si–O/SRO multilayers were prepared on p-Si substrates using magnetron sputtering. X-ray diffraction measurements indicate that a mixture of silicates Er2Si2O7 and Er2SiO5 was formed after the multilayers were annealed at 1000 and 1150 °C. Strong Er3+ 1.53 µm photoluminescence (PL) at room temperature has been observed from these multilayers and the full width at half-maximum of the 1.53 µm peak is less than 1.8 nm for the multilayers annealed at 1150 °C. Er3+ 1.53 µm electroluminescence has been observed from erbium silicate films for the first time.

[1]  K Sun,et al.  Strong enhancement of Er3+ 1.54 µm electroluminescence through amorphous Si nanoparticles , 2008, Nanotechnology.

[2]  F. Priolo,et al.  Synthesis and luminescence properties of erbium silicate thin films , 2008 .

[3]  Maria Miritello,et al.  Efficient Luminescence and Energy Transfer in Erbium Silicate Thin Films , 2007 .

[4]  T. Gregorkiewicz,et al.  Nanosecond dynamics of the near-infrared photoluminescence of Er-doped SiO2 sensitized with Si nanocrystals. , 2006, Physical review letters.

[5]  F. Priolo,et al.  Optical and structural properties of Er2O3 films grown by magnetron sputtering , 2006 .

[6]  H. Isshiki,et al.  The effect of annealing conditions on the crystallization of Er-Si-O formed by solid phase reaction , 2006 .

[7]  Junjie Yu,et al.  Enhancement of 1.53 mu m photoluminescence from spin-coated Er-Si-O (Er2SiO5) crystalline films by nitrogen plasma treatment , 2006 .

[8]  Heon-Jin Choi,et al.  Self-organized growth of Si/Silica/Er2Si2O7 core-shell nanowire heterostructures and their luminescence. , 2005, Nano letters.

[9]  Tadamasa Kimura,et al.  Erbium–Silicon–Oxide crystalline films prepared by MOMBE , 2005 .

[10]  C. Humphreys,et al.  Broadband Sensitization of 1.53 mu m Er[sup 3+] Luminescence in Erbium-Implanted Alumina , 2004 .

[11]  M. D. Dood,et al.  Self-assembled infrared-luminescent Er–Si–O crystallites on silicon , 2004 .

[12]  A. Polman,et al.  Fine structure in the Er-related emission spectrum from Er-Si-O matrices at room temperature under carrier mediated excitation , 2003 .

[13]  Pieter G. Kik,et al.  Strong exciton-erbium coupling in Si nanocrystal-doped SiO2 , 2000 .

[14]  Domenico Pacifici,et al.  Er3+ ions–Si nanocrystals interactions and their effects on the luminescence properties , 2000 .

[15]  J. Shin,et al.  1.54 μm Er3+ photoluminescent properties of erbium-doped Si/SiO2 superlattices , 1999 .

[16]  A. Kasuya,et al.  Resonant excitation of visible photoluminescence from an erbium-oxide overlayer on Si , 1997 .

[17]  Mk Meint Smit,et al.  Net optical gain at 1.53 mu m in Er-doped Al2O3 waveguides on silicon , 1996 .

[18]  J. Poate,et al.  Room‐temperature sharp line electroluminescence at λ=1.54 μm from an erbium‐doped, silicon light‐emitting diode , 1994 .