ANALYSIS AND MODIFICATION OF THE DATA CONVERSION SOFTWARE FOR THE VARIABLE-SHAPED E-BEAM LITHOGRAPHY SYSTEM

This paper presents a kind of data conversion software used in the variable-shaped e-beam lithography,especially on its composition,working theory and working procedure.The paper tells how to use this software package,Moreover,it describes some difficultiesand warning items that may be present in procedure. Some modifications in the softwaremade by authors are presented in this paper also.