论文信息 - Silicon nitride on silicon-on-insulator: A platform for integration active control over passive components - 字舞流文

Silicon nitride on silicon-on-insulator: A platform for integration active control over passive components

We propose the use of SOI with silicon nitride layers for electronic control. A phase modulator with a V<sub>π</sub>·L of 1.02 V·mm and a compact vertical coupling taper are demonstrated in an easy-to-fabricate planar structure.

Qiancheng Zhao | Ozdal Boyraz | Mohsen Rajaei

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