论文信息 - Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator - 字舞流文

Thermal stability of diamondlike carbon buried layer fabricated by plasma immersion ion implantation and deposition in silicon on insulator

M. Nastasi | Zhitang Song | P. Chu | L. Shao | Chenglu Lin | Weili Liu | Miao Zhang | Z. Di | S. Luo | R. Fu | A. Huang | T. Höchbauer | Q. Shen