Development and characterization of an artificial hair cell based on polyurethane elastomer and force sensitive resistors

The performance of polyurethane (PU) and polydimethylsiloxane (PDMS) elastomers are compared in a battery of tests showing that the two PU formulations tested compare very favorably with PDMS mechanically and in terms of adhesion, while sacrificing some resistance to solvents and chemicals. PU is then used to form the structure and sensing elements of an all-polymer artificial hair cell. The demonstrated artificial hair cells are composed of a PU cilium on top of force sensitive resistors (FSRs) that detect cilium motion. The FSR is a mixture of carbon nanoparticles and PU, patterned using a newly developed method. Sensitivity of the demonstrated device (245 ppm/mum of tip deflection) is improved by an order of magnitude over previous single-axis polymer AHCs with additional improvements in robustness. Both carbon black and multi-walled nanotubes are tested as conductive fillers, with MWNT providing increased sensitivity

[1]  J U Meyer,et al.  Micropatterned biocompatible materials with applications for cell cultivation , 1995 .

[2]  Carlos Domínguez,et al.  Photocurable polymers applied as encapsulating materials for ISFET production , 1995 .

[3]  Katsunori Shida,et al.  Discrimination of material property by pressure-conductive rubber sheet sensor with multi-sensing function , 1996, Proceedings of IEEE International Symposium on Industrial Electronics.

[4]  Isao Shimoyama,et al.  An air flow sensor modeled on wind receptor hairs of insects , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[5]  Sheryl Coombs,et al.  Smart Skins: Information Processing by Lateral Line Flow Sensors , 2001, Auton. Robots.

[6]  F. Barth,et al.  Arthropod touch reception: spider hair sensilla as rapid touch detectors , 2001, Journal of Comparative Physiology A.

[7]  Jack Chen,et al.  Design and fabrication of artificial lateral line flow sensors , 2002 .

[8]  J. Chen,et al.  Development of polymer-based artificial haircell using surface micromachining and 3D assembly , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[9]  M. Narkis,et al.  Sensing of liquids by electrically conductive immiscible polypropylene/thermoplastic polyurethane blends containing carbon black , 2003 .

[10]  Ronald S. Fearing,et al.  Fabrication of gecko foot-hair like nano structures and adhesion to random rough surfaces , 2003, 2003 Third IEEE Conference on Nanotechnology, 2003. IEEE-NANO 2003..

[11]  Chang Liu,et al.  A method for precision patterning of silicone elastomer and its applications , 2004, Journal of Microelectromechanical Systems.

[12]  Friedrich G Barth,et al.  Spider mechanoreceptors , 2004, Current Opinion in Neurobiology.

[13]  M. Dijkstra,et al.  Arrays of cricket-inspired sensory hairs with capacitive motion detection , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..