Nonlocal effects in a bounded afterglow plasma with fast electrons

Effects connected with nonlocality of the electron energy distribution function (EEDF) in a bounded, afterglow plasma with fast electrons can lead to a significant (many times of Te/e) increase in the near-wall potential drop, even if the density of this fast group is only a small fraction of the total electron density. This can substantially change the near-wall sheath thickness and electric field. Nonlocal fast electrons which are partially trapped in the plasma volume can increase the rate of stepwise excitation, supply additional heating to slow electrons and reduce their diffusion cooling rate. Altering the source terms of these fast electrons, to change their production rate will, therefore, alter the near-wall sheath and, through modification of the EEDF, a number of plasma parameters. Another possibility of modifying the EEDF is by application of a negative potential to a portion of the plasma boundary. This can allow modification of the fast part of the EEDF. The above effects and methods can be used in various research and technical applications

[1]  A. Kudryavtsev,et al.  Anomalously high near-wall sheath potential drop in a plasma with nonlocal fast electrons. , 2005, Physical review letters.

[2]  V. Demidov,et al.  Spectroscopic study of a pulsed argon rf ICP discharge: stepwise excitation in the afterglow and its application in optical spectroscopy , 2005 .

[3]  A. Kudryavtsev,et al.  Modification of a nonlocal electron energy distribution in a bounded plasma. , 2005, Physical review. E, Statistical, nonlinear, and soft matter physics.

[4]  V. Demidov,et al.  Diode calibration of a Langmuir probe system for measurement of electron energy distribution functions in a plasma , 2005 .

[5]  L. Anderson,et al.  Electron-impact excitation out of the metastable levels of krypton. , 2005, Physical review letters.

[6]  A. Lichtenberg,et al.  Principles of Plasma Discharges and Materials Processing: Lieberman/Plasma 2e , 2005 .

[7]  A. Kudryavtsev,et al.  Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma , 2004 .

[8]  A. Kono Structure of collisional and collisionless sheaths: closed expressions for sheath thickness , 2004 .

[9]  R. M. Sankaran,et al.  High-pressure micro-discharges in etching and deposition applications , 2003 .

[10]  R. Franklin The plasma–sheath boundary region , 2003 .

[11]  Jane P. Chang,et al.  Lecture Notes on Principles of Plasma Processing , 2003 .

[12]  V. Demidov,et al.  Electric probes for plasmas: The link between theory and instrument , 2002 .

[13]  Uwe Kortshagen,et al.  Experimental study of diffusive cooling of electrons in a pulsed inductively coupled plasma. , 2002, Physical review. E, Statistical, nonlinear, and soft matter physics.

[14]  J. Giuliani,et al.  Electron-impact excitation from the (4p 5 5s) metastable states of krypton , 2002 .

[15]  L. Tsendin,et al.  The unipolar ion sheath , 2001 .

[16]  A. Kudryavtsev,et al.  Electron-distribution-function cutoff mechanism in a low-pressure afterglow plasma. , 2001, Physical review. E, Statistical, nonlinear, and soft matter physics.

[17]  J. Loureiro,et al.  Relaxation of the electron energy distribution function in the afterglow of a N2 microwave discharge including space-charge field effects. , 2001, Physical review. E, Statistical, nonlinear, and soft matter physics.

[18]  Wei Guo,et al.  Time-resolved current and voltage measurements on a pulsed rf inductively coupled plasma† , 2001 .

[19]  A. Kudryavtsev,et al.  Modeling of nonlocal electron kinetics in a low-pressure afterglow plasma , 1998 .

[20]  L. Overzet,et al.  Effect of metastable atom reactions on the electron energy probability functions in afterglows , 1998 .

[21]  D. J. Economou,et al.  Fluid simulation of a pulsed-power inductively coupled argon plasma , 1998 .

[22]  T. Bräuer,et al.  The temporal decay of the diffusion-determined afterglow plasma of the positive column , 1997 .

[23]  Sumio Ashida,et al.  Global models of pulse-power-modulated high-density, low-pressure discharges , 1996 .

[24]  K. Riemann The Bohm criterion and boundary conditions for a multicomponent system , 1995 .

[25]  L. Tsendin Electron kinetics in non-uniform glow discharge plasmas , 1995 .

[26]  A. Blagoev,et al.  Interaction processes with creation of fast electrons in the low temperature plasma , 1994 .

[27]  P. Španěl,et al.  Electron Temperature Relaxation in Afterglow Plasmas: Diffusion Cooling , 1994 .

[28]  P. Španěl,et al.  Studies of Electron Attachment at Thermal Energies Using the Flowing Afterglow–Langmuir Probe Technique , 1994 .

[29]  A. Klucharev Chemi-ionization processes , 1993 .

[30]  A. Blagoev,et al.  REVIEWS OF TOPICAL PROBLEMS: lonization and quenching of excited atoms with the production of fast electrons , 1993 .

[31]  N B Kolokolov,et al.  lonization and quenching of excited atoms with the production of fast electrons , 1993 .

[32]  F. Miyawaki,et al.  Formation of presheath and current‐free double layer in a two‐electron‐temperature plasma , 1992 .

[33]  V. Ivanov REVIEWS OF TOPICAL PROBLEMS: Dissociative recombination of molecular ions in noble-gas plasmas , 1992 .

[34]  A. Laganà,et al.  Progress in the non-equilibrium vibrational kinetics of hydrogen in magnetic multicusp H - ion sources , 1987 .

[35]  V. Demidov,et al.  Study of elastic electron collisions by plasma electron spectroscopy , 1987 .

[36]  V. Demidov,et al.  Electron energy distribution and potential drop near the wall in a plasma with fast-electron sources , 1986 .

[37]  V. Demidov,et al.  Electron spectra from slow collisions of excited noble gas atoms , 1983 .

[38]  V. Demidov,et al.  Electron energy distribution, electron temperature, and stepwise excitation in afterglow plasma , 1982 .

[39]  V. Demidov,et al.  Electron energy distribution functions in an afterglow plasma. V - Charged-particle diffusion and the distribution function , 1980 .

[40]  J. H. Ingold,et al.  Diffusion Cooling of Electrons in Afterglow Plasmas , 1972 .

[41]  Gusinow,et al.  PROPERTIES OF AN AFTERGLOW HELIUM PLASMA. , 1969 .

[42]  D. Stedman,et al.  Chemical applications of metastable argon atoms II. A clean system for the formation of N2(A3σ+u) , 1968 .

[43]  A. V. Tiggelen,et al.  CHEMI-IONIZATION PROCESSES. , 1966 .

[44]  M. A. Biondi Diffusion Cooling of Electrons in Ionized Gases , 1954 .