Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

In this paper, a single-layer guided-mode resonance (GMR) filter based on a free-standing silicon-nitride membrane suspended on a silicon substrate is achieved by using bulk-micromachining technology. Both of grating and waveguide structures without a lower-cladding layer, i.e., substrate, are fabricated simultaneously on a silicon-nitride membrane. The device can be used as a transmission bandstop filter with the advantages of simple structure, high efficiency, and feasibility to integrate with other optoelectronic elements into a microsystem chip. The design consideration, fabrication procedures, and measured spectral response are shown in this paper. Moreover, by stacking two proposed devices, /spl Delta//spl lambda/ of the stopband at a transmission below 10% is 5.06 nm.

[1]  A. A. Friesem,et al.  Narrow spectral bandwidths with grating waveguide structures , 1996 .

[2]  Kieron Burke,et al.  Design of a grating-based thin-film filter for broadband spectropolarimetry. , 2003, Applied optics.

[3]  V. Aksyuk,et al.  Wavelength add-drop switching using tilting micromirrors , 1999 .

[4]  Carole Rossi,et al.  Pyrotechnic actuator: a new generation of Si integrated actuator , 1999 .

[5]  Z. S. Liu,et al.  Guided-mode resonance Brewster filter. , 1998, Optics letters.

[6]  R. Magnusson,et al.  Resonant leaky-mode spectral-band engineering and device applications. , 2004, Optics express.

[7]  A A Friesem,et al.  Light modulation with resonant grating-waveguide structures. , 1996, Optics letters.

[8]  G. M. Morris,et al.  Controlling the spectral response in guided-mode resonance filter design. , 2003, Applied optics.

[9]  M. Moharam,et al.  Flat-top narrow-band spectral response obtained from cascaded resonant grating reflection filters. , 2002, Applied optics.

[10]  Thomas R. Ohnstein,et al.  TUNABLE IR FILTERS WITH INTEGRAL ELECTROMAGNETIC ACTUATORS , 1999 .

[11]  Lei Wang,et al.  Beam selector dependent on incident angle by guided-mode resonant subwavelength grating , 2002 .

[12]  P. Rochon,et al.  Narrow-band resonant grating waveguide filters constructed with azobenzene polymers. , 1999, Applied optics.

[13]  S. S. Wang,et al.  Design of waveguide-grating filters with symmetrical line shapes and low sidebands. , 1994, Optics letters.

[14]  R. Magnusson,et al.  New principle for optical filters , 1992 .

[15]  R. Netterfield,et al.  Low sideband guided-mode resonant filter. , 2000, Applied optics.

[16]  T K Gaylord,et al.  Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: conical diffraction and antireflection designs. , 1994, Applied optics.

[17]  S Tibuleac,et al.  High-efficiency guided-mode resonance filter. , 1998, Optics letters.

[18]  S Tibuleac,et al.  Narrow-linewidth bandpass filters with diffractive thin-film layers. , 2001, Optics letters.

[19]  Pasqualina M. Sarro,et al.  Design and fabrication of infrared detector arrays for satellite attitude control , 2000 .

[20]  T K Gaylord,et al.  Normal-incidence guided-mode resonant grating filters: design and experimental demonstration. , 1998, Optics letters.

[21]  Frédérick Mailly,et al.  Anemometer with hot platinum thin film , 2001 .

[22]  P. Temple-Boyer,et al.  Micromachined thermal accelerometer , 2003 .

[23]  Pierre Temple-Boyer,et al.  Realization and performance of thin SiO2/SiNx membrane for microheater applications , 1998 .