Semiconductor manufacturing scheduling and dispatching: State of the art and survey of needs

This chapter discusses scheduHng and dispatching in one of the most complex manufacturing environments wafer fabrication faciHties. These facilities represent the most costly and time-consuming portion of the semiconductor manufacturing process. After a brief introduction to wafer fabrication operations, the results of a survey of semiconductor manufacturers that focused on the current state of the practice and future needs are presented. Then the chapter presents a review of some recent dispatching approaches and finally an overview of a recent deterministic scheduling approach is provided.

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