Tailoring the graphene/silicon carbide interface for monolithic wafer-scale electronics

Graphene is an outstanding electronic material, predicted to have a role in post-silicon electronics. However, owing to the absence of an electronic bandgap, graphene switching devices with high on/off ratio are still lacking. Here in the search for a comprehensive concept for wafer-scale graphene electronics, we present a monolithic transistor that uses the entire material system epitaxial graphene on silicon carbide (0001). This system consists of the graphene layer with its vanishing energy gap, the underlying semiconductor and their common interface. The graphene/semiconductor interfaces are tailor-made for ohmic as well as for Schottky contacts side-by-side on the same chip. We demonstrate normally on and normally off operation of a single transistor with on/off ratios exceeding 10(4) and no damping at megahertz frequencies. In its simplest realization, the fabrication process requires only one lithography step to build transistors, diodes, resistors and eventually integrated circuits without the need of metallic interconnects.

[1]  R. Johnson,et al.  Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: A review , 1996 .

[2]  L. Vandersypen,et al.  Gate-induced insulating state in bilayer graphene devices. , 2007, Nature materials.

[3]  T. Ohta,et al.  Controlling the Electronic Structure of Bilayer Graphene , 2006, Science.

[4]  Fengnian Xia,et al.  Graphene field-effect transistors with high on/off current ratio and large transport band gap at room temperature. , 2010, Nano letters.

[5]  F. Schwierz Graphene transistors. , 2010, Nature nanotechnology.

[6]  S. Sze,et al.  Physics of Semiconductor Devices: Sze/Physics , 2006 .

[7]  C. Beenakker Andreev reflection and Klein tunneling in graphene , 2007, 0710.3848.

[8]  Jehoshua Bruck,et al.  Graphene-based atomic-scale switches. , 2008, Nano letters.

[9]  W. J. Choyke,et al.  Silicon carbide : recent major advances , 2004 .

[10]  Michael Krieger,et al.  Bottom-gated epitaxial graphene. , 2011, Nature materials.

[11]  Andre K. Geim,et al.  The rise of graphene. , 2007, Nature materials.

[12]  H. B. Weber,et al.  Current annealing and electrical breakdown of epitaxial graphene , 2011 .

[13]  L. Ley,et al.  Silicon Carbide: Volume 2: Power Devices and Sensors , 2009 .

[14]  Marc Dubois,et al.  Electron properties of fluorinated single-layer graphene transistors , 2010, 1005.3474.

[15]  T. Blank,et al.  Mechanisms of current flow in metal-semiconductor ohmic contacts , 2007 .

[16]  L. Ley,et al.  Silicon Carbide: Volume 1: Growth, Defects, and Novel Applications , 2009 .

[17]  M. Lemme Current Status of Graphene Transistors , 2009, 0911.4685.

[18]  John W. Palmour,et al.  6H–silicon carbide devices and applications , 1993 .

[19]  K. Novoselov,et al.  Micrometer-scale ballistic transport in encapsulated graphene at room temperature. , 2011, Nano letters.

[20]  F. Guinea,et al.  Biased bilayer graphene: semiconductor with a gap tunable by the electric field effect. , 2006, Physical review letters.

[21]  S. Sriram,et al.  SiC for Microwave Power Transistors , 1997 .

[22]  H. Matsunami,et al.  Analysis of Schottky Barrier Heights of Metal/SiC Contacts and Its Possible Application to High‐Voltage Rectifying Devices , 1997 .

[23]  Kostya S. Novoselov,et al.  Graphene: Materials in the flatland , 2011 .

[24]  Anant K. Agarwal,et al.  Performance, Reliability, and Robustness of 4H-SiC Power DMOSFETs , 2010 .

[25]  Heiko B. Weber,et al.  Quantum oscillations and quantum Hall effect in epitaxial graphene , 2010 .

[26]  P. Machac,et al.  Origin of ohmic behavior in Ni, Ni2Si and Pd contacts on n-type SiC , 2010 .

[27]  T. Tang,et al.  Direct observation of a widely tunable bandgap in bilayer graphene , 2009, Nature.

[28]  A. Balandin Thermal properties of graphene and nanostructured carbon materials. , 2011, Nature materials.

[29]  W. J. Choyke,et al.  Hall effect and infrared absorption measurements on nitrogen donors in 6H‐silicon carbide , 1992 .

[30]  Thomas Frank,et al.  SiC MATERIAL PROPERTIES , 2005 .

[31]  H. Grubin The physics of semiconductor devices , 1979, IEEE Journal of Quantum Electronics.

[32]  C. Berger,et al.  Electronic Confinement and Coherence in Patterned Epitaxial Graphene , 2006, Science.

[33]  Stefan Hertel,et al.  A switch for epitaxial graphene electronics: Utilizing the silicon carbide substrate as transistor channel , 2012 .

[34]  C. Coletti,et al.  Ambipolar doping in quasifree epitaxial graphene on SiC(0001) controlled by Ge intercalation , 2011 .

[35]  V. Kravets,et al.  Fluorographene: a two-dimensional counterpart of Teflon. , 2010, Small.

[36]  P. Kim,et al.  Electron transport in disordered graphene nanoribbons. , 2009, Physical review letters.

[37]  J.H. Klootwijk,et al.  Merits and limitations of circular TLM structures for contact resistance determination for novel III-V HBTs , 2004, Proceedings of the 2004 International Conference on Microelectronic Test Structures (IEEE Cat. No.04CH37516).

[38]  Vladimir I. Fal'ko,et al.  Selective transmission of Dirac electrons and ballistic magnetoresistance of n − p junctions in graphene , 2006 .

[39]  Robert C. Wolpert,et al.  A Review of the , 1985 .

[40]  K. Novoselov Nobel Lecture: Graphene: Materials in the Flatland , 2011 .

[41]  K. Emtsev,et al.  Effect of an intermediate graphite layer on the electronic properties of metal/SiC contacts , 2008 .

[42]  B. Appleton,et al.  Tuning Schottky diodes at the many-layer-graphene/ semiconductor interface by doping , 2011 .

[43]  C. Dimitrakopoulos,et al.  Wafer-Scale Graphene Integrated Circuit , 2011, Science.

[44]  P. Kim,et al.  Energy band-gap engineering of graphene nanoribbons. , 2007, Physical review letters.

[45]  C. Coletti,et al.  Quasi-free-standing epitaxial graphene on SiC obtained by hydrogen intercalation. , 2009, Physical review letters.

[46]  H. B. Weber,et al.  Towards wafer-size graphene layers by atmospheric pressure graphitization of silicon carbide. , 2009, Nature materials.

[47]  C. Berger,et al.  Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics. , 2004, cond-mat/0410240.