Invariant imbedding in semiconductor device simulation

Abstract A general, fail-safe and fool-proof numerical algorithm called invariant imbedding is used to successfully solve both the Poisson equation and the continuity equations for two-dimensional (2-D) problems. This direct method avoids the convergence problem commonly encountered in iterative methods, and is computationally more efficient than the classical Gaussian elimination method especially when the insulator occupies a large portion of the semiconductor device under simulation, and/or more accurate treatments are made for the interfacial region.