论文信息 - Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements

Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements

The construction and technical characteristics of the phase interferometric microscope MIM-2.1 are described. With the help of this modulation interferometric microscope, a vertical resolution up to fractions of a nanometer and a lateral resolution up to tens of nanometers are achieved. The results of measurements obtained on samples of different types, such as a column, a step, a flute, and a fragment of a DVD disk, are presented.

[1] Vladimir P Tychinskii. Microscopy of subwavelength structures , 1996 .

[2] V. Andreev,et al. Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. General Principles of Design and Operation , 2005 .

[3] R D Allen,et al. New observations on cell architecture and dynamics by video-enhanced contrast optical microscopy. , 1985, Annual review of biophysics and biophysical chemistry.

[4] R D Allen,et al. Video‐enhanced microscopy with a computer frame memory , 1983, Journal of microscopy.

[5] Kenneth R. Spring,et al. Video Microscopy: The Fundamentals , 1986 .

[6] R D Allen,et al. Video-enhanced contrast, differential interference contrast (AVEC-DIC) microscopy: a new method capable of analyzing microtubule-related motility in the reticulopodial network of Allogromia laticollaris. , 1981, Cell motility.

[7] J. Slavik,et al. Fluorescence Microscopy and Fluorescent Probes , 1996, Springer US.

[8] P. A. Osipov. Modulation interference microscope , 2003, Saratov Fall Meeting.