Calibration of scanning electron microscope using a multi-image non-linear minimization process

In this paper, a novel approach of SEM calibration based on non-linear minimization process is presented. The SEM calibration for the intrinsic parameters are achieved by an iterative non-linear optimization algorithm which minimize the registration error between the current estimated position of the pattern and its observed position. The calibration can be achieved by one image and multiple images of calibration pattern. Perspective and parallel projection models are addressed in this approach. The experimental results show the efficiency and accuracy of the proposed method.

[1]  Duane C. Brown,et al.  Close-Range Camera Calibration , 1971 .

[2]  Éric Marchand,et al.  ViSP for visual servoing: a generic software platform with a wide class of robot control skills , 2005, IEEE Robotics & Automation Magazine.

[3]  Neil A. Thacker,et al.  Surface Approximation from Industrial SEM Images , 1996, BMVC.

[4]  Paul R. Cohen,et al.  Motion and structure estimation from stereo image sequences , 1992, IEEE Trans. Robotics Autom..

[5]  Zhengyou Zhang,et al.  A Flexible New Technique for Camera Calibration , 2000, IEEE Trans. Pattern Anal. Mach. Intell..

[6]  Michael A. Sutton,et al.  Automated 3-D Reconstruction Using a Scanning Electron Microscope , 2003 .

[7]  Michael A. Sutton,et al.  Metrology in a scanning electron microscope: theoretical developments and experimental validation , 2006 .

[8]  Sounkalo Dembélé,et al.  Magnification-continuous static calibration model of a scanning-electron microscope , 2012, J. Electronic Imaging.

[9]  Roger Y. Tsai,et al.  A versatile camera calibration technique for high-accuracy 3D machine vision metrology using off-the-shelf TV cameras and lenses , 1987, IEEE J. Robotics Autom..

[10]  S. Shankar Sastry,et al.  An Invitation to 3-D Vision , 2004 .

[11]  Éric Marchand,et al.  Real-time markerless tracking for augmented reality: the virtual visual servoing framework , 2006, IEEE Transactions on Visualization and Computer Graphics.

[12]  P. G. T. Howell,et al.  A theoretical approach to the errors in SEM photogrammetry , 1978 .

[13]  Matthias Hemmleb,et al.  Fib Stage Calibration with Photogrammetric Methods , 2006 .

[14]  Matthias Hemmleb,et al.  MICROTOPOGRAPHY - THE PHOTOGRAMMETRIC DETERMINATION OF FRICTION SURFACES , 2000 .

[15]  Sanjib Kumar Ghosh,et al.  Photogrammetric calibration of a scanning electron microscope , 1975 .

[16]  Alan Boyde,et al.  Quantitative photogrammetric analysis and qualitative stereoscopic analysis of SEM images , 1973 .

[17]  Janne Heikkilä,et al.  A four-step camera calibration procedure with implicit image correction , 1997, Proceedings of IEEE Computer Society Conference on Computer Vision and Pattern Recognition.

[18]  T. Mulvey,et al.  Electron Optics , 1971, Nature.