Metal-less silicon plasmonic mid-infrared gas sensor

Abstract. We demonstrate an ultracompact integrated silicon-based plasmonic sensor for lab-on-chip applications in the mid-infrared (MIR) spectral range. Our sensor possesses desirable features such as design simplicity and very high sensitivity. The sensor is designed using a platform for plasmonic effects in the MIR using highly doped silicon. This platform is exploited to create a metal-less plasmonic slot waveguide in the MIR range. This plasmonic waveguide is highly sensitive to any environmental change. Full wave electromagnetic simulations were carried out to design and optimize the structure. The proposed sensor covers a large wavelength span in the MIR range. High spectral sensitivity of 5000  nm/RIU was achieved for our sensor device. Further development of the structure was conducted to extend the sensor operation to multigas sensing.

[1]  David D. Nelson,et al.  Recent improvements in atmospheric trace gas monitoring using mid-infrared tunable diode lasers , 1996, Optics & Photonics.

[2]  A Krier,et al.  A novel LED module for the detection of H2S at 3.8 µm , 2000 .

[3]  M. Fox.  Optical Properties of Solids , 2002 .

[4]  Frank K. Tittel,et al.  Mid-Infrared Laser Applications in Spectroscopy , 2003 .

[5]  S. Maier,et al.  Plasmonics: Localization and guiding of electromagnetic energy in metal/dielectric structures , 2005 .

[6]  P. Dumon,et al.  Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology , 2005, Journal of Lightwave Technology.

[7]  Harry A. Atwater.  The promise of plasmonics. , 2007 .

[8]  D T Reid,et al.  Mid-infrared methane detection in a photonic bandgap fiber using a broadband optical parametric oscillator. , 2007, Optics express.

[9]  Richard Soref,et al.  Longwave plasmonics on doped silicon and silicides. , 2008, Optics express.

[10]  R. Bartlome,et al.  Trace gas monitoring with infrared laser-based detection schemes , 2008 .

[11]  S. Kawata,et al.  Plasmonics for near-field nano-imaging and superlensing , 2009 .

[12]  D. Van Thourhout,et al.  Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[13]  R. Soref.  Mid-infrared photonics in silicon and germanium , 2010 .

[14]  H. Atwater,et al.  Plasmonics for improved photovoltaic devices. , 2010, Nature materials.

[15]  Jeffrey N. Anker,et al.  Gas sensing with high-resolution localized surface plasmon resonance spectroscopy. , 2010, Journal of the American Chemical Society.

[16]  Walter R. Buchwald,et al.  Infrared Surface Plasmon Resonance Biosensor , 2010 .

[17]  M. Hentschel,et al.  Infrared perfect absorber and its application as plasmonic sensor. , 2010, Nano letters.

[18]  C. Ning,et al.  All-semiconductor active plasmonic system in mid-infrared wavelengths. , 2011, Optics express.

[19]  Richard A. Soref,et al.  Infrared surface plasmons on heavily doped silicon , 2011 .

[20]  D. Wasserman,et al.  Mid-infrared designer metals , 2012 .

[21]  Sang‐Hyun Oh,et al.  Engineering metallic nanostructures for plasmonics and nanophotonics , 2012, Reports on progress in physics. Physical Society.

[22]  Daniel Wasserman,et al.  Towards nano-scale photonics with micro-scale photons: the opportunities and challenges of mid-infrared plasmonics , 2013 .

[23]  Mohamed A. Swillam,et al.  Resonance-based integrated plasmonic nanosensor for lab-on-chip applications , 2013 .

[24]  Daniel Wasserman,et al.  All-semiconductor plasmonic nanoantennas for infrared sensing. , 2013, Nano letters.

[25]  U. Kortshagen,et al.  Phosphorus-doped silicon nanocrystals exhibiting mid-infrared localized surface plasmon resonance. , 2013, Nano letters.

[26]  Richard A. Soref,et al.  Silicon-on-nitride structures for mid-infrared gap-plasmon waveguiding , 2014 .

[27]  Mohamed A. Swillam,et al.  Integrated coupled multi-stage plasmonic resonator for on-chip sensing , 2014, Photonics Europe.

[28]  Cui Yiping,et al.  Design of a compact and high sensitive refractive index sensor base on metal-insulator-metal plasmonic Bragg grating. , 2014, Optics express.

[29]  Melanie L Sattler,et al.  Mobile measurement of methane and hydrogen sulfide at natural gas production site fence lines in the Texas Barnett Shale , 2014, Journal of the Air & Waste Management Association.

[30]  Mohamed A. Swillam,et al.  Silicon Waveguides at the Mid-Infrared , 2015, Journal of Lightwave Technology.

[31]  Mohamed A. Swillam,et al.  Plasmonic waveguides in mid-infrared using silicon-insulator-silicon , 2015, Photonics West - Optoelectronic Materials and Devices.

[32]  Li Yu,et al.  High sensitivity plasmonic sensing based on Fano interference in a rectangular ring waveguide , 2015 .