On-chip Integration Of High-voltage Generator Circuits For An Electrostatic Micromotor

This paper presents a high-voltage generator circuit as power supply for an electrostatic micromotor with process integration based on a standard 2/spl mu/m CMOS technology. This voltage multiplier circuit utilizes n-type wells in a standard 2/spl mu/m CMOS process as a vital innovation to achieve electrically isolated and floated diodes. This design secures a high-voltage output limited only by the breakdown voltage of n-well to p-substrate pn junctions. For the process we used, the power supply can provide /spl equiv/50V output by inputting 5V dc power and two non-overlapping 0/5V clock signals.