A 56MΩ CMOS TIA for MEMS applications

We present the analysis, design, and measurement results of a high-gain, low-noise differential transimpedance amplifier (TIA) designed to interface with electrostatic Microelectromechanical Systems (MEMS) resonators. A capacitive-feedback current amplifier drives current into an active load to obtain a 56 Mμ transimpedance gain, 1.8 MHz bandwidth, phase response near 0°, and 65 fA/√Hz input-referred noise. The TIA was fabricated in 0.18 µm CMOS technology and dissipates 436μW from a 1.8V supply.

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