Micromachined infrared detectors based on pyroelectric thin films

The state of the art of thin-film pyroelectric infrared (IR) detectors is reviewed covering device physics, material performance, micro-fabrication and device examples. Emphasis is given to special issues related to thin films, such as small heat capacities and the substrate influence on the pyroelectric properties. For the latter, an overview of the hitherto reported values is given. Examples of micromachined IR detectors based on pyroelectric thin films are described. The ultimate limit of micromachined thermal IR detectors is estimated for uncooled operation. It is concluded that the best pyroelectric thin films achieved to date are in principle sufficiently good to approach this limit, meaning that the present performance of pyroelectric thin-film focal plane arrays can still be improved by more than a factor of 10. A comparison of the different principles for IR detection shows that pyroelectricity is indeed one of the most competitive principles for uncooled IR detection. The major obstacle hindering quick industrialization is the fabrication complexity.

[1]  Paul Muralt,et al.  Piezoelectric thin films for MEMS , 1997, Applied Physics Letters.

[2]  D. Vanderbilt,et al.  Quantitative analysis of the first-principles effective-Hamiltonian approach to ferroelectric perovskites , 2002, cond-mat/0210496.

[3]  N. Setter,et al.  Pyroelectric nanoporous films: Synthesis and properties , 2002 .

[4]  R. Whatmore,et al.  Piezo- and pyroelectric properties of lead scandium tantalate thin films , 2001 .

[5]  Andrei Osinsky,et al.  Free-standing films of PbSc0.5Ta0.5O3 for uncooled infrared detectors , 2001 .

[6]  Raymond S. Balcerak,et al.  Uncooled infrared sensors: rapid growth and future perspective , 2000, Defense, Security, and Sensing.

[7]  Neal R. Butler,et al.  Ambient temperature IR focal plane arrays , 2000, Defense, Security, and Sensing.

[8]  P. Muralt.  Ferroelectric thin films for micro-sensors and actuators: a review , 2000 .

[9]  A. Majumdar,et al.  Infrared vision using uncooled micro-optomechanical camera , 1999 .

[10]  N. Setter,et al.  Microstructural evolution of dense and porous pyroelectric Pb_1−xCa_xTiO_3 thin films , 1999 .

[11]  Paul Muralt,et al.  Poling of ferroelectric thin films , 1999 .

[12]  A. Tagantsev.  Mechanisms of Dielectric Loss in Microwave Materials , 1999 .

[13]  Nicolas Ledermann,et al.  Study of the Transverse Piezoelectric Coefficient of Pb(Zr,Ti)O3 Thin Films as a Function of Texture and Composition , 1999 .

[14]  Paul Muralt,et al.  Thin film pyroelectric array as a detector for an infrared gas spectrometer , 1998 .

[15]  Judith A. Ruffner,et al.  Uncooled thin film infrared imaging device with aerogel thermal isolation: deposition and planarization techniques , 1998 .

[16]  N. Setter,et al.  Relaxor behavior and electromechanical properties of Pb(Mg1/3Nb2/3)O3 thin films , 1998 .

[17]  Howard R. Beratan,et al.  Advances in monolithic ferroelectric uncooled IRFPA technology , 1998, Defense, Security, and Sensing.

[18]  Paul Muralt,et al.  Removal of 90° domain pinning in (100) Pb(Zr0.15Ti0.85)O3 thin films by pulsed operation , 1998 .

[19]  Paul Muralt,et al.  Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding , 1998 .

[20]  N. Setter,et al.  High figure-of-merit porous Pb1-xCaxTiO3 thin films for pyroelectric applications , 1998 .

[21]  N. Setter,et al.  Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon , 1998 .

[22]  P. Muralt,et al.  Poling of pyroelectric thin films , 1998 .

[23]  M. Daglish,et al.  A dynamic method for determining the pyroelectric response of thin films , 1998 .

[24]  M.-A. Dubois,et al.  PZT thin film actuated elastic fin micromotor , 1998, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[25]  Marc Madou,et al.  Fundamentals of Microfabrication , 2002 .

[26]  P. Muralt,et al.  Thin film pyroelectric arrays as infra-red detectors , 1997 .

[27]  Y. Watabe,et al.  A high performance amorphous Si/sub 1-x/C/sub x/:H thermistor bolometer based on micro-machined structure , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[28]  Tayfun Akin,et al.  An integrated thermopile structure with high responsivity using any standard CMOS process , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[29]  Daniel Bloyet,et al.  Suspended epitaxial YBaCuO microbolometers fabricated by silicon micromachining: Modeling and measurements , 1997 .

[30]  Peter Ryser,et al.  Pyroelectric thin-film sensor array , 1997 .

[31]  Gerhard Müller,et al.  Frontside micromachining using purous-silicon sacrificial-layer technologies , 1997 .

[32]  Martin J. de Nivelle,et al.  A high-T/sub c/ superconductor bolometer on a silicon nitride membrane , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.

[33]  C. Hanson.  Hybrid Pyroelectric-Ferroelectric Bolometer Arrays , 1997 .

[34]  D. Polla,et al.  Monolithic Pyroelectric Bolometer Arrays , 1997 .

[35]  Wolfram Wersing,et al.  Deposition of self-polarized PZT films by planar multi-target sputtering , 1997 .

[36]  D. Polla,et al.  Chapter 5 Monolithic Pyroelectric Bolometer Arrays , 1997 .

[37]  Charles M. Hanson,et al.  Chapter 4 Hybrid Pyroelectric-Ferroelectric Bolometer Arrays , 1997 .

[38]  Rudolph G. Buser,et al.  Chapter 1 Historical Overview , 1997 .

[39]  N. Pertsev,et al.  Domain populations in epitaxial ferroelectric thin films: Theoretical calculations and comparison with experiment , 1996 .

[40]  Panos G. Datskos,et al.  Remote optical detection using microcantilevers , 1996 .

[41]  Siegfried Bauer,et al.  Pyroelectric polymer electrets , 1996 .

[42]  Johannes G.E. Gardeniers,et al.  Porous silicon bulk micromachining for thermally isolated membrane formation , 1996 .

[43]  Donhang Liu,et al.  Low-temperature preparation of perovskite Pb(Sc0.5Ta0.5)O3 thin films using MOCVD , 1996 .

[44]  P. Muralt.  Piezoelectric and pyroelectric microsystems based on ferroelectric thin films , 1996, ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics.

[45]  Rex Watton,et al.  Ferroelectric IR bolometers - from ceramic hybrid arrays to direct thin film integration , 1996 .

[46]  Paul Antony Manning,et al.  Uncooled IR imaging: hybrid and integrated bolometer arrays , 1996, Defense, Security, and Sensing.

[47]  Masahiko Sano,et al.  Performance improvement of HgCdTe photoconductive detectors , 1996, Defense, Security, and Sensing.

[48]  Howard R. Beratan,et al.  Producibility advances in hybrid uncooled infrared devices II , 1996, Defense + Commercial Sensing.

[49]  J. Speck,et al.  Microstructural instability in single-crystal thin films , 1996 .

[50]  B. Lewis.  A Historical Overview , 1996 .

[51]  W. Pompe,et al.  Relative coherency strain and phase transformation history in epitaxial ferroelectric thin films , 1996 .

[52]  C. Araujo,et al.  Ferroelectric thin films : synthesis and basic properties , 1996 .

[53]  Bernd Ploss,et al.  Thin nickel films as absorbers in pyroelectric sensor arrays , 1995 .

[54]  J. Ganne,et al.  Texture, structure and domain microstructure of ferroelectric PZT thin films , 1995 .

[55]  F. Tong,et al.  High TcYBa2Cu3O7−δ superconducting transition-edge microbolometers , 1995 .

[56]  Bernd Ploss,et al.  Thermal simulation of micromachined bridges for integrated pyroelectric sensor arrays , 1995 .

[57]  N. M. Shorrocks,et al.  Integrated thin film PZT pyroelectric detector arrays , 1995 .

[58]  T. Maeder,et al.  Processing and properties of thin film pyroelectric devices , 1995 .

[59]  R. Takayama,et al.  Pyroelectric infrared sensors made of La-modified PbTiO3 thin films and their applications , 1995 .

[60]  H. Kurz,et al.  Epitaxial YBa2Cu3O7−δ air‐bridge microbolometers on silicon substrates , 1995 .

[61]  Philippe M. Tribolet,et al.  Uncooled infrared monolithic imaging sensor using pyroelectric polymer , 1995, Optics & Photonics.

[62]  P. W. Kruse,et al.  Uncooled IR focal plane arrays , 1995, Optics & Photonics.

[63]  Tatsuo Nakayama,et al.  Pyroelectric linear array infrared sensors made of La-modified PbTiO3 thin films and their applications , 1995, Optics & Photonics.

[64]  Christer Jansson,et al.  Theoretical analysis of pulse bias heating of resistance bolometer infrared detectors and effectiveness of bias compensation , 1995, Optics & Photonics.

[65]  Neal R. Butler,et al.  Low-cost uncooled microbolometer imaging system for dual use , 1995, Optics & Photonics.

[66]  F. Bauer,et al.  Pyroelectric properties of a VDF/TrFE-on-silicon sensor , 1995 .

[67]  N. Neumann,et al.  Infrared sensor based on the monolithic structure Si-P(VDF/TrFE) , 1995 .

[68]  D. M. Miller,et al.  Substrate effects on the structure of epitaxial PbTiO3 thin films prepared on MgO, LaAlO3, and SrTiO3 by metalorganic chemical‐vapor deposition , 1995 .

[69]  Paul W. Kruse,et al.  A comparison of the limits to the performance of thermal and photon detector imaging arrays , 1995 .

[70]  James S. Speck,et al.  Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric thin films. III. Interfacial defects and domain misorientations , 1995 .

[71]  D. Payne,et al.  LOWER TEMPERATURE CRYSTALLIZATION AND ORDERING IN SOL-GEL DERIVED PB(SC0.5TA0.5)O3 POWDERS AND THIN LAYERS , 1995 .

[72]  J. Speck,et al.  Epitaxial growth of PbTiO_3 thin films on (001) SrTiO_3 from solution precursors , 1995 .

[73]  Jun Hee Lee,et al.  Voltage offsets in (Pb,La)(Zr,Ti)O3 thin films , 1995 .

[74]  Katsuhiro Aoki,et al.  Effects of Titanium Buffer Layer on Lead-Zirconate-Titanate Crystallization Processes in Sol-Gel Deposition Technique , 1995 .

[75]  Paul Muralt,et al.  Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications , 1995 .

[76]  Yu Hong Huang,et al.  Sol-gel PbTiO3 thin films for pyroelectric applications , 1995 .

[77]  Y. Nemirovsky,et al.  A thin film pyroelectric detector , 1995 .

[78]  T. Maeder,et al.  Ferroelectric thin films for microsystems , 1995 .

[79]  S. Desu,et al.  Formation kinetics of PbZr_xTi_1−xO_3 thin films , 1994 .

[80]  James S. Speck,et al.  Domain configurations due to multiple misfit relaxation mechanisms in epitaxial ferroelectric thin films. II. Experimental verification and implications , 1994 .

[81]  James S. Speck,et al.  DOMAIN CONFIGURATIONS DUE TO MULTIPLE MISFIT RELAXATION MECHANISMS IN EPITAXIAL FERROELECTRIC THIN FILMS. I: THEORY , 1994 .

[82]  P. Dobson,et al.  Pyroelectric properties of fine bartum titanate/70:30MOL% poly(vinylidene fluoride: Trifluoroethylene) thin-film composites , 1994 .

[83]  James K. Gimzewski,et al.  Observation of a chemical reaction using a micromechanical sensor , 1994 .

[84]  R. Gutmann,et al.  Liquid Phase Epitaxy of Na 1−y K y Ta 1−x Nb x O 3 for Pyroelectric Applications , 1994 .

[85]  Tsutomu Nakanishi,et al.  Fabrication of a New Pyroelectric Infrared Sensor Using MgO Surface Micromachining , 1993 .

[86]  Z. Suo,et al.  Elastic energy release due to domain formation in the strained epitaxy of ferroelectric and ferroelastic films , 1993 .

[87]  A. Tagantsev,et al.  The Spontaneous Relaxor-Ferroelectric Transition of Pb(Sc0.5ta0.5)O3 , 1993 .

[88]  K. C. Liddiard,et al.  Application of interferometric enhancement to self-absorbing thin film thermal IR detectors , 1993 .

[89]  M. Grimsditch,et al.  The elastic, piezoelectric and dielectric constants of tetragonal PbTiO3 single crystals , 1993 .

[90]  Y. Tomita,et al.  Sputtering of Lead-Based Ferroelectrics , 1993 .

[91]  N. Neumann,et al.  PyI12: Pyroelectric single-element detectors and arrays based on modified TGS , 1992 .

[92]  S. Bauer-Gogonea,et al.  The physics of pyroelectric infrared devices , 1992 .

[93]  I. Zakharchenko,et al.  Phase transition and domain structure of heteroepitaxial PbTiO3/(001) MgO films , 1992 .

[94]  Howard R. Beratan,et al.  Pyroelectric imaging , 1992, ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics.

[95]  J. Fricke,et al.  Thermal properties of silica aerogels between 1.4 and 330 K , 1992 .

[96]  A. Tagantsev,et al.  Intrinsic dielectric loss in crystals , 1991 .

[97]  H. Sandmaier,et al.  Absorbing layers for thermal infrared detectors , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[98]  R. Watton,et al.  Induced pyroelectricity in sputtered lead scandium tantalate films and their merit for IR detector arrays , 1991 .

[99]  Masanori Okuyama,et al.  Room-temperature-operated infrared image CCD sensor using pyroelectric gate coupled by dielectric connector , 1991 .

[100]  Henry Baltes,et al.  Silicon gas flow sensors using industrial CMOS and bipolar IC technology , 1991 .

[101]  A. Heuberger,et al.  Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I . Orientation Dependence and Behavior of Passivation Layers , 1990 .

[102]  P. Richards,et al.  Fabrication of an infrared bolometer with a high T/sub c/ superconducting thermometer , 1990 .

[103]  N. M. Shorrocks,et al.  Lead scandium tantalate for thermal detector applications , 1990 .

[104]  T. Ikeda.  Fundamentals of piezoelectricity , 1990 .

[105]  Leslie E. Cross,et al.  Thermodynamic theory of the lead zirconate-titanate solid solution system, part III: Curie constant and sixth-order polarization interaction dielectric stiffness coefficients , 1989 .

[106]  K. Tominaga,et al.  Preparation of c-Axis-Oriented PbTiO3 Thin Films by MOCVD under Reduced Pressure , 1989 .

[107]  J. Fricke,et al.  THERMAL PROPERTIES OF SILICA AEROGELS , 1989 .

[108]  P. Würfel,et al.  A 16-element linear pyroelectric array with NaNO2 thin films , 1989 .

[109]  Antoni Rogalski,et al.  Intrinsic infrared detectors , 1988 .

[110]  Roger W. Whatmore,et al.  Pyroelectric devices and materials , 1986 .

[111]  Yoshihiro Tomita,et al.  Preparation of c‐axis oriented PbTiO3 thin films and their crystallographic, dielectric, and pyroelectric properties , 1986 .

[112]  S. Porter.  A brief guide to pyroelectric detectors , 1981 .

[113]  P. Würfel,et al.  NaNO2 layers as pyroelectric radiation detectors , 1981 .

[114]  P. Kruse,et al.  The photon detection process , 1980 .

[115]  J. Piotrowski,et al.  Uncooled photoconductive (Cd,Hg)Te detectors for the 8–14 μm region , 1979 .

[116]  S. T. Liu,et al.  Pyroelectric effects in thin film , 1978 .

[117]  A. M. Glass,et al.  Principles and Applications of Ferroelectrics and Related Materials , 1977 .

[118]  A. L. Roitburd,et al.  Equilibrium structure of epitaxial layers , 1976 .

[119]  J. M. Lloyd,et al.  Thermal Imaging Systems , 1975 .

[120]  J. M. Lloyd,et al.  Thermal Imaging System Types , 1975 .

[121]  S. Lang,et al.  Sourcebook of pyroelectricity , 1974 .

[122]  S. T. Liu,et al.  Evaluation of curie constants of ferroelectric crystals from pyroelectric response , 1974 .

[123]  L. Benguigui.  Ferroelectric losses in BaTiO3 produced the 90° domain walls , 1974 .

[124]  E. H. Putley,et al.  The Pyroelectric Detector , 1970 .

[125]  E. H. Putley,et al.  Chapter 6 The Pyroelectric Detector , 1970 .

[126]  S. M. Sze,et al.  Physics of semiconductor devices , 1969 .

[127]  R. B. McQuistan,et al.  Elements of infrared technology: generation, transmission, and detection , 1962 .

[128]  J. Nye.  Physical Properties of Crystals: Their Representation by Tensors and Matrices , 1957 .