19.5 μW ultra-low-power 13.56 MHz RFID tag based on transparent zinc-oxide thin-film transistors

A novel systematic technological process for ZnO-thin-film transistors (TFTs) fabrication was developed which turned out to achieve near-zero threshold voltage devices with good performance and stability. A deuterium implantation method was realised as well to fabricate depletion n-type ZnO TFTs. The inverters based on enhancement/depletion ZnO TFTs reached nearly full swing (0.01-5 V at 5 V VDD) and pretty large noise margin (VNML = 1.01 and VNMH = 3.61 V). Moreover, a transparent radio-frequency identification (RFID) tag chip based on ZnO TFTs was developed. This tag with an anti-collision algorithm for ISO-14443 type-A was first realised under 5 μm ZnO-TFT technology. The proposed RFID tag exhibits ultra-low-power dissipation of <;19.5 μW at 3 V VDD and a reasonable chip area of 4.7 mm 2 .

[1]  JianJang Huang,et al.  Indium–gallium–zinc oxide thin film transistors with a hybrid-channel structure for defect suppression and mobility improvement , 2013 .

[2]  Lei Lu,et al.  Zinc-Oxide Thin-Film Transistor With Self-Aligned Source/Drain Regions Doped With Implanted Boron for Enhanced Thermal Stability , 2012, IEEE Transactions on Electron Devices.

[3]  Byung-Do Yang,et al.  A Transparent Logic Circuit for RFID Tag in a‐IGZO TFT Technology , 2013 .

[4]  Ying Wang,et al.  Low-Power Transparent RFID Circuits Using Enhancement/Depletion Logic Gates Based on Deuterium-Treated ZnO TFTs , 2017, IEEE Electron Device Letters.

[5]  Shi-Jin Ding,et al.  Performance Improvement of Atomic Layer-Deposited ZnO/Al2O3 Thin-Film Transistors by Low-Temperature Annealing in Air , 2016, IEEE Transactions on Electron Devices.

[6]  Gang Li,et al.  The influence of channel layer thickness on the electrical properties of ZnO TFTs , 2014 .

[7]  Dae-Shik Seo,et al.  High-performance ZnO thin-film transistor fabricated by atomic layer deposition , 2011 .

[8]  Zhi Ye,et al.  Characteristics of Plasma-Fluorinated Zinc Oxide Thin-Film Transistors , 2012, IEEE Electron Device Letters.

[9]  Man Wong,et al.  High Precision Active-Matrix Self-Capacitive Touch Panel Based on Fluorinated ZnO Thin-Film Transistor , 2015, Journal of Display Technology.

[10]  J. A. Luna-López,et al.  Impact of active layer thickness in thin-film transistors based on Zinc Oxide by ultrasonic spray pyrolysis , 2015 .

[11]  Sorin Cristoloveanu,et al.  Mobility behavior and models for fully depleted nanocrystalline ZnO thin film transistors , 2013 .

[12]  Tokiyoshi Matsuda,et al.  Novel top‐gate zinc oxide thin‐film transistors (ZnO TFTs) for AMLCDs , 2007 .

[13]  Christopher Pearson,et al.  Bootstrapped inverter using a pentacene thin-film transistor with a poly(methyl methacrylate) gate dielectric , 2009, IET Circuits Devices Syst..

[14]  Lei Zhou,et al.  Manchester-encoded data transmission circuit integrated by metal-oxide TFTs suitable for 13.56 MHz radio-frequency identification tag application , 2018, IET Circuits Devices Syst..

[15]  Ying Wang,et al.  Highly Stable Atomic Layer Deposited Zinc Oxide Thin-Film Transistors Incorporating Triple O2 Annealing , 2017, IEEE Transactions on Electron Devices.

[16]  Manuel Quevedo-Lopez,et al.  Effect of depth of traps in ZnO polycrystalline thin films on ZnO-TFTs performance , 2016 .

[17]  Peng Zhou,et al.  Mobility Enhancement and OFF Current Suppression in Atomic-Layer-Deposited ZnO Thin-Film Transistors by Post Annealing in O2 , 2014, IEEE Electron Device Letters.

[18]  JianJang Huang,et al.  Demonstration of radio-frequency response of amorphous IGZO thin film transistors on the glass substrate , 2015 .

[19]  Benjamin J. Norris,et al.  ZnO-based transparent thin-film transistors , 2003 .

[20]  H. Ozaki,et al.  Oxide TFT Rectifier Achieving 13.56-MHz Wireless Operation , 2012, IEEE Transactions on Electron Devices.

[21]  Israel Mejia,et al.  Fully patterned and low temperature transparent ZnO-based inverters , 2013 .

[22]  Kimoon Lee,et al.  Transparent and Photo‐stable ZnO Thin‐film Transistors to Drive an Active Matrix Organic‐Light‐ Emitting‐Diode Display Panel , 2009 .