Development of high-efficiency CIGS integrated submodules using in-line deposition technology

Abstract We have developed a fabrication process for integrated submodules using Cu(In,Ga)Se 2 (CIGS) absorbers deposited by in-line three-stage evaporation. An in-situ monitoring system for the compositions and thicknesses of the CIGS absorbers was also developed. High-performance CIGS submodules with efficiencies as high as η =15.8% with 17 interconnected cells (aperture area: 76.5 cm 2 ) have been fabricated.