论文信息 - Wireless Ceramic Sensors Operating in High Temperature Environments

Wireless Ceramic Sensors Operating in High Temperature Environments

A platform for the wireless transmission of data at high temperature is presented. The platform is demonstrated by means of a wireless temperature sensor fabricated from multilayer high -temperature ceramic MEMS technology. Extensions of the platform to chemical sensing are also discussed. As a first example of high temperature, wireless chemical sensi ng, a carbon dioxide sensor is implemented.

Mark G. Allen | M. Allen | E. Birdsell | Edward D. Birdsell

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