Hierarchical evolutionary synthesis of MEMS

We discuss the hierarchy that is involved in a typical MEMS design and how evolutionary approaches can be used to automate the hierarchical design and synthesis process for MEMS. At the system level, the approach combining bond graphs and genetic programming can lead to satisfactory design candidates of system level models that meet the predefined behavioral specifications for designers to tradeoff. At the physical layout synthesis level, the selection of geometric parameters for component devices is formulated as a constrained optimization problem and addressed using a constrained GA approach. A multiple-resonator microsystem design is used to illustrate the integrated design automation idea using evolutionary approaches.