论文信息 - Magnetic RF integrated thin-film inductors

Magnetic RF integrated thin-film inductors

The magnetic thin film inductor with a 4-turn, 337/spl times/337 /spl mu/m/sup 2/ size spiral coil showed inductance 21% larger than the air core's while its quality factor was lower than the air core's. Keeping the similar quality factor as the air core, the micro patterned magnetic film inductor showed 11% inductance enhancement. The proposed inductor can be made on the passivation of integrated semiconductor devices.

[1] K. Jenkins,et al. Microwave inductors and capacitors in standard multilevel interconnect silicon technology , 1996 .

[2] Ali M. Niknejad,et al. Numerically stable Green function for modeling and analysis of substrate coupling in integrated circuits , 1998, IEEE Trans. Comput. Aided Des. Integr. Circuits Syst..

[3] 賢一荒井,et al. 高抵抗 Fe-Al-O 薄膜の透磁率特性 , 1996 .

[4] Masahiro Yamaguchi,et al. MICROFABRICATION AND CHARACTERISTICS OF MAGNETIC THIN-FILM INDUCTORS IN THE ULTRAHIGH FREQUENCY REGION , 1999 .

[5] A. Abidi,et al. Large suspended inductors on silicon and their use in a 2- mu m CMOS RF amplifier , 1993, IEEE Electron Device Letters.

[6] W. Roshen. Effect of finite thickness of magnetic substrate on planar inductors , 1990 .

[7] J.N. Burghartz,et al. Multilevel-spiral inductors using VLSI interconnect technology , 1996, IEEE Electron Device Letters.