A SAW Filter of Elliptic Structure IDT

The design uses silicon-AlN thin films as the piezoelectric substrate, Use apo- dization weighting methods to optimize the design of IDT. The improved δ function model was Modeling Tools of Apodization weighted ellipse IDT structure, According to the result of simulation, we designed a layout of SAW band-pass filter and fabricated a sample of it which center frequency is 300MHz and insertion loss is 7dB, The research shows the consistency of simulation results with the experimental results.