论文信息 - Selective etching of GaAs over Al0.2Ga0.8As semiconductor in pulsed DC BCl3/SF6 plasmas - 字舞流文

Selective etching of GaAs over Al0.2Ga0.8As semiconductor in pulsed DC BCl3/SF6 plasmas

S. Pearton | J. Lee | D. Park | K. Sohn | G. Cho | J. Shin | K. H. Choi | H. Song | K. Noh | J. Shin