EVALUATION OF PROPERTIES OF NANO-CMM BY THERMAL DRIFT AND TILT ANGLE

We have started developing novel systems and key technology as "Nano-CMM project". In this project, our intention is developing the CMM with nano meter resolution to measure three-dimensional positions, orientations and parameters of three-dimensional features. For developing Nano-CMM, we evaluate properties of stages for Nano-CMM by thermal drift and tilt angles. In this report, the thermal drift and tilt angles of stages of Nano-CMM were evaluated. Then we made the new prototype of Nano-CMM made of low thermal expansion iron steel to reduce the influence of thermal drift and we also propose new construction of Nano-CMM for reducing the effect by tilt angles.