MEMS in Mass Storage Systems

[1]  T. Kenny,et al.  Process compatible polysilicon-based electrical through-wafer interconnects in silicon substrates , 2002 .

[2]  Osaaki Watanuki,et al.  Small magnetic patterns written with a scanning tunneling microscope , 1991 .

[3]  Takahiro Imamura,et al.  MEMS-based integrated head/actuator/slider for hard disk drives , 1998 .

[4]  J. Daval,et al.  Ultra high density data storage on phase change materials with electrical micro-tips , 1999 .

[5]  Toshiki Hirano,et al.  High-bandwidth HDD tracking servo by a moving-slider micro-actuator , 1999 .

[6]  S. Naberhuis Probe-based recording technology , 2002 .

[7]  D. Rugar,et al.  Thermomechanical writing with an atomic force microscope tip , 1992 .

[8]  L. Richard Carley,et al.  MEMS-based integrated-circuit mass-storage systems , 2000, CACM.

[9]  Takashi Nakano,et al.  The Characteristics and the Potential of Super Resolution Near-Field Structure , 2000 .

[10]  N. D. Rooij,et al.  Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors , 1996 .

[11]  M. Brehmer,et al.  New Developments in Soft Lithography , 2003 .

[12]  Calvin F. Quate,et al.  Charge storage in a nitride‐oxide‐silicon medium by scanning capacitance microscopy , 1991 .

[13]  Ute Drechsler,et al.  A Nanotechnology-based Approach to Data Storage , 2003, VLDB.

[14]  C. Spindt A Thin‐Film Field‐Emission Cathode , 1968 .

[15]  E. Oesterschulze,et al.  Modified fabrication process for aperture probe cantilevers , 1999, Journal of microscopy.

[16]  Jong Up Jeon,et al.  Read/write mechanisms and data storage system using atomic force microscopy and MEMS technology. , 2002, Ultramicroscopy.

[17]  G. S. Kino,et al.  High-numerical-aperture lens system for optical storage , 1993 .

[18]  A. Moser,et al.  Thermal effect limits in ultrahigh-density magnetic recording , 1999 .

[19]  Leon Abelmann,et al.  Single-chip computers with microelectromechanical systems-based magnetic memory (invited) , 2000 .

[20]  T. Ohkubo,et al.  Reduced-area magnetic bit recording and detection using magnetic force microscopy based on application of bidirectional magnetomotive force , 1993 .

[21]  T. Milster,et al.  Near-field optics: a new tool for data storage , 2000, Proceedings of the IEEE.

[22]  E. Eleftheriou,et al.  Demonstration of thermomechanical recording at 641 Gbit/in/sup 2/ , 2004, IEEE Transactions on Magnetics.

[23]  Mingsheng Zhang,et al.  Femto slider: fabrication and evaluation , 2003 .

[24]  K. R. Williams,et al.  A high-performance dipole surface drive for large travel and force , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[25]  Fang,et al.  Reversible, nanometer-scale conductance transitions in an organic complex , 2000, Physical review letters.

[26]  H. Rothuizen,et al.  "Millipede": a MEMS-based scanning-probe data-storage system , 2002, Digest of the Asia-Pacific Magnetic Recording Conference.

[27]  Motoichi Ohtsu,et al.  INCREASING THROUGHPUT OF A NEAR-FIELD OPTICAL FIBER PROBE OVER 1000 TIMES BY THE USE OF A TRIPLE-TAPERED STRUCTURE , 1998 .

[28]  A. M. Hoexum,et al.  Large capacity probe recording using storage robots , 2003 .

[29]  L. Carley,et al.  Performance analysis of a 0.3-Tb/in/sup 2/ low-power MFM-based scanning-probe device , 2003 .

[30]  W. Messner,et al.  Piezoelectric microactuator for dual stage control , 1999 .

[31]  J. Judy Past, present, and future of perpendicular magnetic recording , 2001 .

[32]  T. Hirano,et al.  High-bandwidth hard disk drive tracking using a moving-slider MEMS microactuator , 2004, The 8th IEEE International Workshop on Advanced Motion Control, 2004. AMC '04..

[33]  M. Kryder,et al.  Near‐field magneto‐optics and high density data storage , 1992 .

[34]  M. C. Abraham,et al.  Fabrication of patterned media for high density magnetic storage , 1999 .

[35]  Toshihiko Shimizu,et al.  Development of a /spl Phi/-shaped actuated suspension for 100-kTPI hard disk drives , 2001 .

[36]  D. Eigler,et al.  Positioning single atoms with a scanning tunnelling microscope , 1990, Nature.

[37]  Robert C. Barrett,et al.  High-density data storage using proximal probe techniques , 1995, IBM J. Res. Dev..

[38]  Stephen Y. Chou,et al.  Patterned magnetic nanostructures and quantized magnetic disks , 1997, Proc. IEEE.

[39]  S. Manalis,et al.  Submicron studies of recording media using thin‐film magnetic scanning probes , 1995 .

[40]  W. Häberle,et al.  VLSI-NEMS chip for parallel AFM data storage , 2000 .

[41]  Stoddart,et al.  Electronically configurable molecular-based logic gates , 1999, Science.

[42]  Marco Del Sarto,et al.  Batch fabricated silicon electrostatic micropositioner for dual stage actuation , 2003, SPIE MOEMS-MEMS.

[43]  W. Häberle,et al.  The "millipede" - nanotechnology entering data storage , 2002 .

[44]  Margaret Evans Best,et al.  Patterned perpendicular and longitudinal media: a magnetic recording study , 2003 .

[45]  Jordan A. Katine,et al.  E-beam writing: a next-generation lithography approach for thin-film head critical features , 2002 .

[46]  Ralph,et al.  Current-induced switching of domains in magnetic multilayer devices , 1999, Science.

[47]  Hiroyuki Fujita,et al.  A MEMS piggyback actuator for hard-disk drives , 2002 .

[48]  Miko Elwenspoek,et al.  Modeling, design and testing of the electrostatic shuffle motor , 1998 .

[49]  G. Ganger,et al.  System design considerations for MEMS-actuated magnetic-probe-based mass storage , 2001 .

[50]  K. Hane,et al.  Cantilever Probe Integrated with Light-Emitting Diode, Waveguide, Aperture, and Photodiode for Scanning Near-Field Optical Microscope. , 2000 .

[51]  Roberto Horowitz,et al.  Microfabricated electrostatic actuators for hard disk drives , 1998 .

[52]  Gijsbertus J.M. Krijnen,et al.  Versatile trench isolation technology for the fabrication of microactuators , 2003 .

[53]  J. Frommer,et al.  Molecular manipulation using a tunnelling microscope , 1988, Nature.