A Miniature, High-sensitivity, Electron Tunneling Accelerometer

*Jet Propulsion Laboratory, Center for Space Microelectronics Technology, California Institute of Technology, Pasadena, CA 91 109-8099, USA **Now at Stanford University, Department of Mechanical Engineering, Stanford, CA 94305-402 1, USA ***Now at University of California, Los Angeles, Department of Electrical Engineering, Los Angeles, CA 90024-1594, USA, and Jet Propulsion Laboratory ****NAWC Aircraft Division, Code 5044, P.O. Box 5152, Warminster, PA 18974-0591, USA