论文信息 - Damage and Trapping Behaviour of Crystalline Silicon at Low Energy Deuterium Implantation - 字舞流文

Damage and Trapping Behaviour of Crystalline Silicon at Low Energy Deuterium Implantation

D. Hildebrandt | F. Pászti | R. Groetzschel | E. Kótai | H. Strusny

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