Micromachining using high‐power picosecond lasers

For the micromachining of temperature-sensitive and brittle-rigid components ultra short pulsed lasers are being used more and more. Due to the short pulse durations in the femto- and pico second range such systems with only a few Watt of average power have high pulsed peak powers of an order of 10 MW. This allows machining a wide range of materials including transparent materials via non-linear absorption, enabled by the high intensity in the focus of radiation. The intensity can reach values of several TW/cm2. This leads to the immediate evaporation of the material, ideally, without melt and burr.