论文信息 - Nucleation and growth kinetics of AlN films on atomically smooth 6H–SiC (0001) surfaces - 字舞流文

Nucleation and growth kinetics of AlN films on atomically smooth 6H–SiC (0001) surfaces

I. Suemune | N. Teraguchi | A. Avramescu | Y. Aoyagi | Satoru Tanaka | A. Suzuki | Satoshi Yamada | J. Kato