1.7kV trench IGBT with deep and separate floating p-layer designed for low loss, low EMI noise, and high reliability

A novel 1.7kV IGBT with deep floating-p layers separated from trench gates has been developed to realize low loss, low EMI noise, and high reliability. Separating floating-p layers from the trench gates reduces excess V<inf>GE</inf> overshoot, which results in a 51% smaller reverse recovery dV<inf>AK</inf>/dt than the conventional IGBT. The deep floating p-layers weaken the electric field under the trenches, which results in an avalanche breakdown voltage of 2250V. In addition, the E<inf>on</inf> + E<inf>off</inf> for the proposed structure can be reduced by 47% more than that of the conventional one, maintaining a low V<inf>CE(sat)</inf> of 2.3V at 125°C.

[1]  Norihito Tokura Influence of Floating P-Base on Turn-On Characteristics of Trench-Gate FS-IGBT , 2010 .

[2]  Y. Onozawa,et al.  1200 V super low loss IGBT module with low noise characteristics and high dl/dt controllability , 2005, Fourtieth IAS Annual Meeting. Conference Record of the 2005 Industry Applications Conference, 2005..

[3]  K. Saitou,et al.  Advanced HiGT with low-injection punch-through (LiPT) structure [high-conductivity IGBT] , 2004, 2004 Proceedings of the 16th International Symposium on Power Semiconductor Devices and ICs.

[4]  Ichiro Omura,et al.  IEGT design concept against operation instability and its impact to application , 2000, 12th International Symposium on Power Semiconductor Devices & ICs. Proceedings (Cat. No.00CH37094).

[5]  Y. Onozawa,et al.  1200-V Low-Loss IGBT Module With Low Noise Characteristics and High ${d}I_{C}/{d}t$ Controllability , 2007, IEEE Transactions on Industry Applications.

[6]  M.. Mori,et al.  A Trench-Gate High-Conductivity IGBT (HiGT) With Short-Circuit Capability , 2007, IEEE Transactions on Electron Devices.

[7]  Y. Onozawa Development of the next generation 1200V trench-gate FS-IGBT featuring lower EMI noise and lower switching loss , 2007, Proceedings of the 19th International Symposium on Power Semiconductor Devices and IC's.

[8]  Ichiro Omura,et al.  IEGT design criterion for reducing EMI noise , 2004, ISPSD 2004.