A helium mass spectrometry pressed integral leak detection technique for ultra-high vacuum devices

LI Min,YANG Xiao-Jun,HE Ying-Ping,ZHANG Tai-Min,LIU Feng,LIU Bei-Bei, MIAO Zhuang,CHENG Yao-Jin (1. Science and Technology on Low-Light-Level Night Vision Laboratory,Xian,Shanxi 710065,China; 2.Kunming Institute of Physics,Kunming,Yunnan650223,China) Abstract:Based on multi-weld seam of image intensifier tube,we have designed the leak detection platform for high vacuum electron devices,the experimental result show that Helium injection method’s minimum leakage rate is 10Pa·m/s, and pressed integration method’s minimum leakage rate less than 10Pa·m/s, and it is of positive significance to improve the life of the device.