Fabrication of 3-dimensional microstructures using moving mask deep X-ray lithography (M/sup 2/DXL)
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O. Tabata | K. Yamamoto | N. Matsuzuka | T. Yamaji | Hui You | J. Minakuchi
[1] Osamu Tabata,et al. 3-Dimensional Microstructure Fabrication using Multiple Moving Mask Deep X-ray Lithography Process , 2000 .
[2] O. Tabata,et al. Moving mask LIGA (M/sup 2/LIGA) process for control of side wall inclination , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).