Reduction in feature size of two-photon polymerization using SCR500

Fabricated by femtosecond laser pulses at wavelength λ of 780nm, the feature size of two-photon polymerization using SCR500 was reduced to λ∕50. Lines with sub-25-nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700μm∕s. Based on repolymerization between two structures close to each other, the feature size was further reduced to ∼15nm, which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution.

[1]  Yan Li,et al.  Wavy lines in two-photon photopolymerization microfabrication. , 2004, Optics express.

[2]  Saulius Juodkazis,et al.  Two-photon lithography of nanorods in SU-8 photoresist , 2005 .

[3]  Tianyue Yu,et al.  An efficient two-photon-generated photoacid applied to positive-tone 3D microfabrication. , 2002, Science.

[4]  Satoshi Kawata,et al.  Finer features for functional microdevices , 2001, Nature.

[5]  Satoshi Kawata,et al.  Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting , 2005 .

[6]  M. Wegener,et al.  Direct laser writing of three-dimensional photonic-crystal templates for telecommunications , 2004, Nature materials.

[7]  Robert J. DeVoe,et al.  Voxel shapes in two-photon microfabrication , 2003, SPIE Optics + Photonics.

[8]  Hong‐Bo Sun,et al.  Three-dimensional focal spots related to two-photon excitation , 2002 .

[9]  Satoshi Kawata,et al.  The study on spatial resolution in two-photon induced polymerization , 2006, SPIE MOEMS-MEMS.

[10]  Seth R. Marder,et al.  Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication , 1999, Nature.

[11]  Satoshi Kawata,et al.  Two-photon photopolymerization and 3D lithographic microfabrication , 2005 .

[12]  Hong‐Bo Sun,et al.  Multiple-spot parallel processing for laser micronanofabrication , 2005 .

[13]  Satoshi Kawata,et al.  Scaling laws of voxels in two-photon photopolymerization nanofabrication , 2003 .

[14]  Hong‐Bo Sun,et al.  Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization , 2003 .

[15]  Hong‐Bo Sun,et al.  Rapid sub-diffraction-limit laser micro/nanoprocessing in a threshold material system , 2002 .

[16]  M. Gu,et al.  Two-photon polymerisation for three-dimensional micro-fabrication , 2006 .

[17]  Aleksandr Ovsianikov,et al.  Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties. , 2004, Optics express.