Control of piezoelectric actuator with hysteresis and creep

Piezoelectric actuators are essential elements for high-precision positioning in many astronomical applications (OPD modulation for fringe tracking systems, control of tip/tilt modes in Adaptive Optics....). This paper proposes a control method to take into account nonlinear dynamics of piezoelectric actuators such as hysteresis and creep. Some simulations demonstrate the effectiveness of the control approach and experimental results are obtained for the creep compensation.

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