Development of high-density helicon plasma sources and their applications

We report on the development of unique, high-density helicon plasma sources and describe their applications. Characterization of one of the largest helicon plasma sources yet constructed is made. Scalings of the particle production efficiency are derived from various plasma production devices in open literature and our own data from long and short cylinder devices, i.e., high and low values of the aspect ratio A (the ratio of the axial length to the diameter), considering the power balance in the framework of a simple diffusion model. A high plasma production efficiency is demonstrated, and we clarify the structures of the excited waves in the low A region down to 0.075 (the large device diameter of 73.8 cm with the axial length as short as 5.5 cm). We describe the application to plasma propulsion using a new concept that employs no electrodes. A very small diameter (2.5 cm) helicon plasma with 1013 cm−3 density is produced, and the preliminary results of electromagnetic plasma acceleration are briefly de...

[1]  Y. Kawai,et al.  Reduction effect of neutral density on the excitation of turbulent drift waves in a linear magnetized plasma with flow , 2007 .

[2]  Roderick Boswell,et al.  Helicons-the past decade , 1997 .

[3]  Francis F. Chen,et al.  Plasma ionization by helicon waves , 1991 .

[4]  Y. Kawai,et al.  Anatomy of plasma turbulence , 2008 .

[5]  Y. Kawai,et al.  Fine positioning of a poloidal probe array. , 2007, The Review of scientific instruments.

[6]  F. C. Díaz The VASIMR Rocket. , 2000 .

[7]  S. Shinohara,et al.  Control of Electron Density and Rotation Profiles by Voltage Biased Electrodes in RF Produced Plasma , 2001 .

[8]  C. Watts,et al.  Alfvén wave propagation in a helicon plasma , 2001 .

[9]  Robert M. Winglee,et al.  Mini-Magnetospheric Plasma Propulsion: Tapping the energy of the solar wind for spacecraft propulsion , 2000 .

[10]  Y. Kawai,et al.  Effects of antenna wavenumber spectrum and metal end plate on plasma characteristics excited by helicon wave , 1998 .

[11]  K. P. Shamrai,et al.  Effect of electrostatic waves on a rf field penetration into highly collisional helicon plasmas , 2002 .

[12]  A. Fujii,et al.  Characteristics of radio frequency wave propagation in bounded plasma under the various magnetic field configurations , 2001 .

[13]  M. Krämer,et al.  Anomalous helicon wave absorption and parametric excitation of electrostatic fluctuations in a helicon-produced plasma , 2007 .

[14]  Y. Kawai,et al.  Detection of Cascading in Drift Wave Turbulence Using Probe Array in Linear Plasmas , 2007 .

[15]  N. Matsuoka,et al.  Profile Control and Plasma Rotation by Biased Electrodes in Large Diameter RF Produced Plasma , 1999 .

[16]  D. Arnush,et al.  Axial propagation of helicon waves , 1995 .

[17]  J. Kline,et al.  Ion temperature anisotropy limitation in high beta plasmas , 2000 .

[18]  Kyoichiro Toki,et al.  Small helicon plasma source for electric propulsion , 2006 .

[19]  Thomas Klinger,et al.  Spatial mode structures of electrostatic drift waves in a collisional cylindrical helicon plasma , 2004 .

[20]  Hiroshi Mizokoshi,et al.  Development of a strong field helicon plasma source , 2006 .

[21]  I. Funaki,et al.  Plasma Acceleration in a Compact Helicon Source Using RF Antennae , 2009 .

[22]  Y. Kawai,et al.  Dynamic Formation of Excited Helicon Wave Structure and Estimation of Wave Energy Flux Distribution , 1996 .

[23]  S. Shinohara,et al.  Initial Trial of Plasma Mass Separation by Crossed Electric and Magnetic Fields , 2007 .

[24]  Francis F. Chen,et al.  Helicons-the early years , 1997 .

[25]  S. Shinohara,et al.  Characteristics of RF Wave Propagation in Large-Diameter Plasma with Cusp Magnetic Field Configurations , 1999 .

[26]  G. Tynan,et al.  Coexistence of Zonal Flows and Drift-Waves in a Cylindrical Magnetized Plasma(Gases, plasmas, electric discharges, and beams) , 2008 .

[27]  A Study on Low-Frequency Fluctuations Using New Azimuthal Probe Array in High-Density Helicon Linear Plasma , 2007 .

[28]  Y. Nakamura,et al.  Characteristics of bistable transition in magnetized plasma by control of voltage biasing , 2006 .

[29]  R. Boswell,et al.  High-beta plasma effects in a low-pressure helicon plasma , 2007 .

[30]  Jeffrey Hopwood,et al.  Review of inductively coupled plasmas for plasma processing , 1992 .

[31]  Y. Kawai,et al.  Dynamic plasma behaviour excited by m=+or-1 helicon wave , 1995 .

[32]  C. Charles,et al.  A review of recent laboratory double layer experiments , 2007 .

[33]  Y. Kawai,et al.  Spatiotemporal Behavior of Drift Waves in LMD-U , 2008 .

[34]  Toshiaki Watanabe,et al.  Evaluation of Para-Perp Type Mach Probe by Using a Fast Flowing Plasma , 2005 .

[35]  Kenji Tanaka,et al.  Characteristics of Large Diameter, High-Density Helicon Plasma with Short Axial Length Using a Flat Spiral Antenna , 2009 .

[36]  J. Scharer,et al.  Observations of neutral depletion and plasma acceleration in a flowing high-power argon helicon plasma , 2008 .

[37]  Y. Sakawa,et al.  A higher-order radial mode of helicon waves , 1997 .

[38]  Y. Kawai,et al.  Experimental Study of Drift Wave Turbulence in Linear Plasmas , 2008 .

[39]  R. Boswell,et al.  Plasma production using a standing helicon wave , 1970 .

[40]  Y. Kawai,et al.  Nonlinear Energy Transfer of Drift-Wave Fluctuation in a Cylindrical Laboratory Plasma , 2008 .

[41]  Francis F. Chen,et al.  Low frequency electrostatic instability in a helicon plasma , 2001 .

[42]  Shunjiro Shinohara,et al.  Characteristics of a large volume, helicon plasma source , 2005 .

[43]  O. Sakai,et al.  High density central cell plasma production and ion heating by helicon wave damping and its mode conversion into a slow Alfven wave , 1995 .

[44]  K. P. Shamrai,et al.  Spectral and spatial characterization of a radio frequency power absorption in high pressure helicon plasmas , 2001 .

[45]  L. Raja,et al.  Resonant power absorption in helicon plasma sources , 2006 .

[46]  P. Diamond,et al.  Observation of the parametric-modulational instability between the drift-wave fluctuation and azimuthally symmetric sheared radial electric field oscillation in a cylindrical laboratory plasma , 2009 .

[47]  E. Scime,et al.  Neutral density profiles in argon helicon plasmas , 2007 .

[48]  S. Shinohara,et al.  Trials of RF plasma production using different antenna geometries with magnetic field , 1998 .

[49]  S. Shinohara,et al.  Modeling electromagnetic field excitation and rf power absorption in a large helicon plasma , 2006 .

[50]  Y. Kawai,et al.  Helicon m = 0 mode characteristics in large-diameter plasma produced by a planar spiral antenna , 1997 .

[51]  Discharge modes and wave structures using loop antennae in a helicon plasma source , 2000 .

[52]  N. Matsuoka,et al.  Establishment of strong velocity shear and plasma density profile modification with associated low frequency fluctuations , 2001 .

[53]  篠原 俊二郎,et al.  Recent Topics on High Density Plasma Production by Helicon Waves , 2002 .

[54]  Y. Hwang,et al.  Development of a compact helicon ion source for neutron generators , 2004 .

[55]  Francis F. Chen,et al.  Helicon waves in a non-uniform plasma , 1994 .

[56]  D. Branscomb,et al.  Line ratio diagnostics in helium and helium seeded argon plasmas , 2007 .

[57]  O. Kaneko,et al.  Change of magnetized plasma performance by inserted voltage biased plate , 2002 .

[58]  J. Stevens,et al.  Helicon plasma source excited by a flat spiral coil , 1995 .

[59]  K. P. Shamrai,et al.  Wave stimulated phenomena in inductively coupled magnetized plasmas , 2005 .

[60]  S. Shinohara,et al.  Plasma performance in very large helicon device , 2006 .

[61]  Y. Kawai,et al.  Estimation of Electric Fields from Magnetic Field Distributions and an Application to Helicon Wave , 1995 .

[62]  Noah Hershkowitz,et al.  Role of plasma-aided manufacturing in semiconductor fabrication , 1998 .

[63]  Y. Sakawa,et al.  Compact High-Density Plasma Source Produced by Using Standing Helicon Waves , 1999 .

[64]  K. P. Shamrai,et al.  Wave phenomena, hot electrons, and enhanced plasma production in a helicon discharge in a converging magnetic field , 2004 .

[65]  Shunjiro Shinohara,et al.  Propagating Wave Characteristics for Plasma Production in Plasma Processing Field , 1997 .

[66]  K. Itoh,et al.  Numerical Study of Neutral Gas Transport in Linear Plasma Device , 2007 .

[67]  A. Lichtenberg,et al.  Principles of Plasma Discharges and Materials Processing , 1994 .

[68]  Robert M. Winglee,et al.  Plasma characteristics of a high power helicon discharge , 2006 .

[69]  R. Miller,et al.  Density profile control in a large diameter, helicon plasma , 2004 .

[70]  P. Diamond,et al.  Radially sheared azimuthal flows and turbulent transport in a cylindrical plasma , 2004 .

[71]  J. Stober,et al.  The Torsatron TJ-K, an experiment for the investigation of turbulence in a toroidal low-temperature plasma , 2002 .

[72]  Konstantin P. Shamrai,et al.  Volume and surface rf power absorption in a helicon plasma source , 1996 .

[73]  S. Shinohara,et al.  Observation of bistable density transitions in magnetized plasma by voltage-biased electrode , 2002 .

[74]  Direct comparison of experimental and theoretical results on the antenna loading and density jumps in a high pressure helicon source , 2000 .

[75]  Y. Kawai,et al.  Effects of Axial Magnetic Field and Faraday Shield on Characteristics of RF Produced Plasma Using Spiral Antenna , 1996 .

[76]  Shunjiro Shinohara,et al.  Development of very large helicon plasma source , 2004 .