The use of microelectromechanical systems for surge detection in gas turbine engines

Compressor surge results from the instability of highly undesirable oscillations occurring at specific frequencies and at low compressor flow rates in the system. Research has shown that by stabilizing the small-perturbation dynamics, the large-amplitude surge event can be prevented in these systems. In order to completely avoid the initiations of conditions that will lead to surge or stall, engine designs conservatively determine operational stability margins that are far from the stability limit of the compression system. Advanced turbine engines operate with reduced stability margins to increase performance. This reduction in stability margin must be limited to such an extent that does not compromise the operational capability of the engine. Pressure probes equipped with fast-response transducers have been successfully used in axial-flow compressors and turbines but have been rarely used in centrifugal compressors. The harsh thermal environment of operation has limited the use of pressure transducers to operational ranges below 250/spl deg/C effectively precluding measurement at the final stage exit where temperatures are typically in excess 280/spl deg/C depending on the turbine. This paper proposes a hybrid processing method in which a piezoresistive chromium strain gauge is embedded between two thin film silicon carbide (SiC-MEMS) or silicon carbon nitride microelectromechanical (SiCN-MEMS) membranes as an enhanced technique for the design of high temperature pressure transducers. The hybrid process technology, which enables fabrication of such structure, along with the novel packaging principles represents the main contribution of the present report.

[1]  V. Bright,et al.  Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators☆ , 2003 .

[2]  E. Xie,et al.  Preparation and characterization of SiCN films , 2003 .

[3]  V. Bright,et al.  Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer , 2002 .

[4]  Victor M. Bright,et al.  Development of injectable polymer-derived ceramics for high temperature MEMS , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[5]  V. Bright,et al.  Fabrication of SiCN MEMS structures using microforged molds , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[6]  Gary J. Skoch,et al.  An Investigation of Surge in a High-Speed Centrifugal Compressor Using Digital PIV , 2001 .

[7]  G. Sung,et al.  Band gap engineering of SiCN film grown by pulsed laser deposition , 2003 .

[8]  Michael D. Hathaway,et al.  Compressor Stability Enhancement Using Discrete Tip Injection , 2000 .

[9]  Michael D. Hathaway,et al.  Compressor Stability Enhancement Using Discrete Tip Injection , 2001 .

[10]  L. Valavani,et al.  Active control of rotating stall in a low-speed axial compressor , 1993 .

[11]  Edward M. Greitzer,et al.  Numerical simulation of compressor endwall and casing treatment flow phenomena , 1992 .

[12]  J. M. Wolff,et al.  Dynamic pressure measurements using silicon carbide transducers , 2001, ICIASF 2001 Record, 19th International Congress on Instrumentation in Aerospace Simulation Facilities (Cat. No.01CH37215).

[13]  M. Mehregany,et al.  Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD , 1999 .

[14]  S. Weia,et al.  Crystalline SiCN : a hard material rivals to cubic BN , 1999 .

[15]  Jun Matsui,et al.  Passive Control of Rotating Stall in a Parallel-Wall Vaned Diffuser by J-Grooves , 2001 .

[16]  Alan H. Epstein,et al.  Active Stabilization of Rotating Stall and Surge in a Transonic Single Stage Axial Compressor , 1997 .

[17]  L.-A. Liew,et al.  Development of SiCN ceramic thermal actuators , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[18]  David Gordon Wilson,et al.  The design of high-efficiency turbomachinery and gas turbines , 1984 .

[19]  Linan An,et al.  Novel polymer derived ceramic-high temperature heat flux sensor for gas turbine environment , 2006 .

[20]  Edward M. Greitzer,et al.  1997 Best Paper Award—Controls and Diagnostics Committee: Active Stabilization of Rotating Stall and Surge in a Transonic Single-Stage Axial Compressor , 1998 .

[21]  K. Sundaram,et al.  Investigations on hardness of rf sputter deposited SiCN thin films , 2004 .

[22]  Stephane Evoy,et al.  Low-stress silicon carbonitride for the machining of high-frequency nanomechanical resonators , 2007 .

[23]  R. Brook,et al.  Synthesis of dense silicon-based ceramics at low temperatures , 1992, Nature.