论文信息 - Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD - 字舞流文

Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD

K. Nakahara | M. Kondo | K. Koga | M. Shiratani | N. Itagaki | G. Uchida | K. Kamataki | M. Sato | Y. Kawashima | Kosuke Yamamoto