Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a frac tional sliding surface to describe dynamic behavior of the system in the sliding mode stage. A fter a comparison with the classical integer-order counterpart, it is seen that the control system wit h the proposed sliding surface displays better transient performance. The claims are justified thr ough a set of simulations and the results obtained are found promising. Overall, the contribution of t his paper is to demonstrate that the response of the system under control is significantly better fo r the fractional-order differentiation exploited in the sliding surface design stage than that for the classical integer-order one, under the same conditions.

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